JPS57135172A - Electron beam-working method - Google Patents

Electron beam-working method

Info

Publication number
JPS57135172A
JPS57135172A JP1913181A JP1913181A JPS57135172A JP S57135172 A JPS57135172 A JP S57135172A JP 1913181 A JP1913181 A JP 1913181A JP 1913181 A JP1913181 A JP 1913181A JP S57135172 A JPS57135172 A JP S57135172A
Authority
JP
Japan
Prior art keywords
electron beam
working method
working
electron
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1913181A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6255502B2 (enExample
Inventor
Baisubuengaa Jiikufuriito
Botsuperu Buorufugangu
Guriigaa Deiitaa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dr Ing Rudolf Hell GmbH
Original Assignee
Dr Ing Rudolf Hell GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dr Ing Rudolf Hell GmbH filed Critical Dr Ing Rudolf Hell GmbH
Priority to JP1913181A priority Critical patent/JPS57135172A/ja
Publication of JPS57135172A publication Critical patent/JPS57135172A/ja
Publication of JPS6255502B2 publication Critical patent/JPS6255502B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Manufacture Or Reproduction Of Printing Formes (AREA)
  • Welding Or Cutting Using Electron Beams (AREA)
JP1913181A 1981-02-13 1981-02-13 Electron beam-working method Granted JPS57135172A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1913181A JPS57135172A (en) 1981-02-13 1981-02-13 Electron beam-working method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1913181A JPS57135172A (en) 1981-02-13 1981-02-13 Electron beam-working method

Publications (2)

Publication Number Publication Date
JPS57135172A true JPS57135172A (en) 1982-08-20
JPS6255502B2 JPS6255502B2 (enExample) 1987-11-19

Family

ID=11990905

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1913181A Granted JPS57135172A (en) 1981-02-13 1981-02-13 Electron beam-working method

Country Status (1)

Country Link
JP (1) JPS57135172A (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH067933U (ja) * 1982-11-04 1994-02-01 ライノタイプ−ヘル アクチエンゲゼルシャフト 印刷版表面の監視装置
JP2012194174A (ja) * 2011-02-28 2012-10-11 Jfe Steel Corp 電子ビームの照射方法

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2620176B2 (ja) * 1992-10-09 1997-06-11 栄電子工業 株式会社 半導体部品の電子ビ−ム小径穴加工方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH067933U (ja) * 1982-11-04 1994-02-01 ライノタイプ−ヘル アクチエンゲゼルシャフト 印刷版表面の監視装置
JP2012194174A (ja) * 2011-02-28 2012-10-11 Jfe Steel Corp 電子ビームの照射方法

Also Published As

Publication number Publication date
JPS6255502B2 (enExample) 1987-11-19

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