JPS57135172A - Electron beam-working method - Google Patents
Electron beam-working methodInfo
- Publication number
- JPS57135172A JPS57135172A JP1913181A JP1913181A JPS57135172A JP S57135172 A JPS57135172 A JP S57135172A JP 1913181 A JP1913181 A JP 1913181A JP 1913181 A JP1913181 A JP 1913181A JP S57135172 A JPS57135172 A JP S57135172A
- Authority
- JP
- Japan
- Prior art keywords
- electron beam
- working method
- working
- electron
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1913181A JPS57135172A (en) | 1981-02-13 | 1981-02-13 | Electron beam-working method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1913181A JPS57135172A (en) | 1981-02-13 | 1981-02-13 | Electron beam-working method |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS57135172A true JPS57135172A (en) | 1982-08-20 |
JPS6255502B2 JPS6255502B2 (en) | 1987-11-19 |
Family
ID=11990905
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1913181A Granted JPS57135172A (en) | 1981-02-13 | 1981-02-13 | Electron beam-working method |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS57135172A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH067933U (en) * | 1982-11-04 | 1994-02-01 | ライノタイプ−ヘル アクチエンゲゼルシャフト | Printing plate surface monitoring device |
JP2012194174A (en) * | 2011-02-28 | 2012-10-11 | Jfe Steel Corp | Electron beam irradiating method |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2620176B2 (en) * | 1992-10-09 | 1997-06-11 | 栄電子工業 株式会社 | Electronic beam small hole drilling method for semiconductor parts |
-
1981
- 1981-02-13 JP JP1913181A patent/JPS57135172A/en active Granted
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH067933U (en) * | 1982-11-04 | 1994-02-01 | ライノタイプ−ヘル アクチエンゲゼルシャフト | Printing plate surface monitoring device |
JP2012194174A (en) * | 2011-02-28 | 2012-10-11 | Jfe Steel Corp | Electron beam irradiating method |
Also Published As
Publication number | Publication date |
---|---|
JPS6255502B2 (en) | 1987-11-19 |
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