JPS57134941A - Semiconductor device - Google Patents
Semiconductor deviceInfo
- Publication number
- JPS57134941A JPS57134941A JP1964181A JP1964181A JPS57134941A JP S57134941 A JPS57134941 A JP S57134941A JP 1964181 A JP1964181 A JP 1964181A JP 1964181 A JP1964181 A JP 1964181A JP S57134941 A JPS57134941 A JP S57134941A
- Authority
- JP
- Japan
- Prior art keywords
- terminal
- terminals
- measurement
- making
- point position
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/02—Bonding areas ; Manufacturing methods related thereto
- H01L24/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
- H01L24/06—Structure, shape, material or disposition of the bonding areas prior to the connecting process of a plurality of bonding areas
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/02—Bonding areas; Manufacturing methods related thereto
- H01L2224/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
- H01L2224/05—Structure, shape, material or disposition of the bonding areas prior to the connecting process of an individual bonding area
- H01L2224/0554—External layer
- H01L2224/0555—Shape
- H01L2224/05552—Shape in top view
- H01L2224/05553—Shape in top view being rectangular
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/02—Bonding areas; Manufacturing methods related thereto
- H01L2224/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
- H01L2224/05—Structure, shape, material or disposition of the bonding areas prior to the connecting process of an individual bonding area
- H01L2224/0554—External layer
- H01L2224/0555—Shape
- H01L2224/05552—Shape in top view
- H01L2224/05554—Shape in top view being square
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/02—Bonding areas; Manufacturing methods related thereto
- H01L2224/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
- H01L2224/06—Structure, shape, material or disposition of the bonding areas prior to the connecting process of a plurality of bonding areas
- H01L2224/0601—Structure
- H01L2224/0603—Bonding areas having different sizes, e.g. different heights or widths
Landscapes
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Wire Bonding (AREA)
Abstract
PURPOSE:To improve accuracy of measurement in a function test effectively utilizing a limited number of external terminals by making at least one of a large number of terminals bigger than the others. CONSTITUTION:A terminal 5 for external connection is made 200mumX100mum large extending to a limit leaving 50mum spaces to adjacent terminals allowed by fabrication work while terminals 4 and 6 are 100mumX100mum in size. A distance between the centers of each terminal is kept at 200mum considering the fabrication allowance. A detector point position 25 of the terminal is used for current supply and measurement while a detector point position 26 for voltage measurement thus making it possible to accurately measure the potential of the terminal 5 and to use the terminal 6 for output for other purposes.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1964181A JPS57134941A (en) | 1981-02-13 | 1981-02-13 | Semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1964181A JPS57134941A (en) | 1981-02-13 | 1981-02-13 | Semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS57134941A true JPS57134941A (en) | 1982-08-20 |
Family
ID=12004846
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1964181A Pending JPS57134941A (en) | 1981-02-13 | 1981-02-13 | Semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS57134941A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0346246A (en) * | 1989-07-14 | 1991-02-27 | Tokyo Electron Ltd | Inspecting device |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS523384A (en) * | 1975-06-24 | 1977-01-11 | Siemens Ag | Comb teeth shaped conductor for semiconductor elements or integrated circuits |
-
1981
- 1981-02-13 JP JP1964181A patent/JPS57134941A/en active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS523384A (en) * | 1975-06-24 | 1977-01-11 | Siemens Ag | Comb teeth shaped conductor for semiconductor elements or integrated circuits |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0346246A (en) * | 1989-07-14 | 1991-02-27 | Tokyo Electron Ltd | Inspecting device |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JPS5735320A (en) | Structure of mask for baking of semiconductor integrated circuit | |
JPS57134941A (en) | Semiconductor device | |
DE3574909D1 (en) | DEVICE FOR MEASURING LOW CURRENTS WITH A HIGH DYNAMIC RANGE. | |
JPS5242167A (en) | Semiconductor pressure gauge | |
JPS57148347A (en) | Measurement of connection accuracy for electron beam exposure | |
AT367210B (en) | MEASURING DEVICE IN HIGH VOLTAGE SYSTEMS | |
SE8005478L (en) | SHORT CIRCUIT INDICATOR IN HIGH VOLTAGE DISTRIBUTIONS | |
JPS55130137A (en) | Inspection method of semiconductor wafer and probe card | |
JPS52128071A (en) | Automatic test unit | |
JPS55149028A (en) | Load detector | |
JPS5328469A (en) | Digital tester | |
SU515192A1 (en) | Device for measuring the amount of electricity | |
JPS5322476A (en) | Measuring jig | |
SU610291A1 (en) | Voltage comparator | |
JPS5340572A (en) | Bodily temperature measuring device | |
JPS5361977A (en) | Constant current load circuit for measuring semiconductor elementcharacteristics | |
JPS536574A (en) | Spring contact probe needle used for checking jig of semiconductor* hybric ic or the like | |
JPS57191896A (en) | Semiconductor integrated circuit | |
Khan | Solid-State Precision Voltage Sources for Use in Potentiometric Measurement | |
JPS5343482A (en) | Leakage current measuring method of semiconductor device | |
JPS56114347A (en) | Probe card | |
JPS5436149A (en) | Test unit for semiconductor integrated circuit | |
JPS5333193A (en) | Measuring apparatus of transformed quantity at diffusion welding | |
JPS5384686A (en) | Power source current measuring method of highly integrated ic | |
JPS5414683A (en) | Measuring circuit for turn-off time |