JPS57134612U - - Google Patents

Info

Publication number
JPS57134612U
JPS57134612U JP2177581U JP2177581U JPS57134612U JP S57134612 U JPS57134612 U JP S57134612U JP 2177581 U JP2177581 U JP 2177581U JP 2177581 U JP2177581 U JP 2177581U JP S57134612 U JPS57134612 U JP S57134612U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2177581U
Other languages
Japanese (ja)
Other versions
JPS6313446Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1981021775U priority Critical patent/JPS6313446Y2/ja
Priority to US06/348,086 priority patent/US4547073A/en
Publication of JPS57134612U publication Critical patent/JPS57134612U/ja
Application granted granted Critical
Publication of JPS6313446Y2 publication Critical patent/JPS6313446Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP1981021775U 1981-02-17 1981-02-17 Expired JPS6313446Y2 (enrdf_load_stackoverflow)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP1981021775U JPS6313446Y2 (enrdf_load_stackoverflow) 1981-02-17 1981-02-17
US06/348,086 US4547073A (en) 1981-02-17 1982-02-11 Surface examining apparatus and method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1981021775U JPS6313446Y2 (enrdf_load_stackoverflow) 1981-02-17 1981-02-17

Publications (2)

Publication Number Publication Date
JPS57134612U true JPS57134612U (enrdf_load_stackoverflow) 1982-08-21
JPS6313446Y2 JPS6313446Y2 (enrdf_load_stackoverflow) 1988-04-16

Family

ID=29819619

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1981021775U Expired JPS6313446Y2 (enrdf_load_stackoverflow) 1981-02-17 1981-02-17

Country Status (1)

Country Link
JP (1) JPS6313446Y2 (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1008883B1 (en) * 1997-07-29 2013-03-27 NanoSystem Solutions, Inc. Surface examination apparatus and method
JP2016156822A (ja) * 2015-02-25 2016-09-01 株式会社昭和電気研究所 ウェハ欠陥検査装置
JP2017207386A (ja) * 2016-05-19 2017-11-24 株式会社神戸製鋼所 金属板の粗さ推定方法及び粗さ推定装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3815998A (en) * 1972-10-30 1974-06-11 Ibm Surface contrast system and method
JPS55101002A (en) * 1979-01-26 1980-08-01 Hitachi Ltd Inspecting method for mirror face body

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3815998A (en) * 1972-10-30 1974-06-11 Ibm Surface contrast system and method
JPS55101002A (en) * 1979-01-26 1980-08-01 Hitachi Ltd Inspecting method for mirror face body

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1008883B1 (en) * 1997-07-29 2013-03-27 NanoSystem Solutions, Inc. Surface examination apparatus and method
JP2016156822A (ja) * 2015-02-25 2016-09-01 株式会社昭和電気研究所 ウェハ欠陥検査装置
JP2017207386A (ja) * 2016-05-19 2017-11-24 株式会社神戸製鋼所 金属板の粗さ推定方法及び粗さ推定装置

Also Published As

Publication number Publication date
JPS6313446Y2 (enrdf_load_stackoverflow) 1988-04-16

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