JPS57134612U - - Google Patents
Info
- Publication number
- JPS57134612U JPS57134612U JP2177581U JP2177581U JPS57134612U JP S57134612 U JPS57134612 U JP S57134612U JP 2177581 U JP2177581 U JP 2177581U JP 2177581 U JP2177581 U JP 2177581U JP S57134612 U JPS57134612 U JP S57134612U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Instruments For Measurement Of Length By Optical Means (AREA)
- Length Measuring Devices By Optical Means (AREA)
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1981021775U JPS6313446Y2 (OSRAM) | 1981-02-17 | 1981-02-17 | |
| US06/348,086 US4547073A (en) | 1981-02-17 | 1982-02-11 | Surface examining apparatus and method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1981021775U JPS6313446Y2 (OSRAM) | 1981-02-17 | 1981-02-17 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS57134612U true JPS57134612U (OSRAM) | 1982-08-21 |
| JPS6313446Y2 JPS6313446Y2 (OSRAM) | 1988-04-16 |
Family
ID=29819619
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1981021775U Expired JPS6313446Y2 (OSRAM) | 1981-02-17 | 1981-02-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6313446Y2 (OSRAM) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1008883B1 (en) * | 1997-07-29 | 2013-03-27 | NanoSystem Solutions, Inc. | Surface examination apparatus and method |
| JP2016156822A (ja) * | 2015-02-25 | 2016-09-01 | 株式会社昭和電気研究所 | ウェハ欠陥検査装置 |
| JP2017207386A (ja) * | 2016-05-19 | 2017-11-24 | 株式会社神戸製鋼所 | 金属板の粗さ推定方法及び粗さ推定装置 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3815998A (en) * | 1972-10-30 | 1974-06-11 | Ibm | Surface contrast system and method |
| JPS55101002A (en) * | 1979-01-26 | 1980-08-01 | Hitachi Ltd | Inspecting method for mirror face body |
-
1981
- 1981-02-17 JP JP1981021775U patent/JPS6313446Y2/ja not_active Expired
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3815998A (en) * | 1972-10-30 | 1974-06-11 | Ibm | Surface contrast system and method |
| JPS55101002A (en) * | 1979-01-26 | 1980-08-01 | Hitachi Ltd | Inspecting method for mirror face body |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1008883B1 (en) * | 1997-07-29 | 2013-03-27 | NanoSystem Solutions, Inc. | Surface examination apparatus and method |
| JP2016156822A (ja) * | 2015-02-25 | 2016-09-01 | 株式会社昭和電気研究所 | ウェハ欠陥検査装置 |
| JP2017207386A (ja) * | 2016-05-19 | 2017-11-24 | 株式会社神戸製鋼所 | 金属板の粗さ推定方法及び粗さ推定装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6313446Y2 (OSRAM) | 1988-04-16 |