JPS5713307A - Position detector - Google Patents

Position detector

Info

Publication number
JPS5713307A
JPS5713307A JP8654580A JP8654580A JPS5713307A JP S5713307 A JPS5713307 A JP S5713307A JP 8654580 A JP8654580 A JP 8654580A JP 8654580 A JP8654580 A JP 8654580A JP S5713307 A JPS5713307 A JP S5713307A
Authority
JP
Japan
Prior art keywords
slit
dusts
transparent members
onto
light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8654580A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6230362B2 (enrdf_load_stackoverflow
Inventor
Katsuhide Tanoshima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Oki Electric Industry Co Ltd
Original Assignee
Oki Electric Industry Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oki Electric Industry Co Ltd filed Critical Oki Electric Industry Co Ltd
Priority to JP8654580A priority Critical patent/JPS5713307A/ja
Publication of JPS5713307A publication Critical patent/JPS5713307A/ja
Publication of JPS6230362B2 publication Critical patent/JPS6230362B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
    • G01D5/34707—Scales; Discs, e.g. fixation, fabrication, compensation
    • G01D5/34715—Scale reading or illumination devices

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Control Of Position Or Direction (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Optical Transform (AREA)
JP8654580A 1980-06-27 1980-06-27 Position detector Granted JPS5713307A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8654580A JPS5713307A (en) 1980-06-27 1980-06-27 Position detector

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8654580A JPS5713307A (en) 1980-06-27 1980-06-27 Position detector

Publications (2)

Publication Number Publication Date
JPS5713307A true JPS5713307A (en) 1982-01-23
JPS6230362B2 JPS6230362B2 (enrdf_load_stackoverflow) 1987-07-02

Family

ID=13889971

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8654580A Granted JPS5713307A (en) 1980-06-27 1980-06-27 Position detector

Country Status (1)

Country Link
JP (1) JPS5713307A (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0358689A4 (en) * 1987-04-27 1992-01-08 Printware, Inc. Optical position encoder
JP2012138602A (ja) * 2008-12-03 2012-07-19 Asml Netherlands Bv リソグラフィ装置及びデバイス製造方法
DE102005013222B4 (de) * 2005-03-17 2015-12-31 Dr. Johannes Heidenhain Gmbh Positionsmesseinrichtung

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4952567U (enrdf_load_stackoverflow) * 1972-08-10 1974-05-09

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4952567U (enrdf_load_stackoverflow) * 1972-08-10 1974-05-09

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0358689A4 (en) * 1987-04-27 1992-01-08 Printware, Inc. Optical position encoder
DE102005013222B4 (de) * 2005-03-17 2015-12-31 Dr. Johannes Heidenhain Gmbh Positionsmesseinrichtung
JP2012138602A (ja) * 2008-12-03 2012-07-19 Asml Netherlands Bv リソグラフィ装置及びデバイス製造方法
US10197927B2 (en) 2008-12-03 2019-02-05 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method having a barrier and/or a contamination removal device for a sensor and/or grating
US10866530B2 (en) 2008-12-03 2020-12-15 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method
US11609504B2 (en) 2008-12-03 2023-03-21 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method

Also Published As

Publication number Publication date
JPS6230362B2 (enrdf_load_stackoverflow) 1987-07-02

Similar Documents

Publication Publication Date Title
DE3471835D1 (en) Optical device for the concentration of the light emitted by a led, and led comprising such a device
JPS5433683A (en) Air seal mounting for light emitting element
EP0590151A4 (en) Cloth inspecting device on loom
JPS5713307A (en) Position detector
ATE24249T1 (de) Signalanzeige.
EP0229960A3 (en) Liquid level sensor
JPS5210697A (en) Luminous signal plate
JPS6454207A (en) Optical measuring apparatus of film thickness
JPS577544A (en) Road surface condition detector
JPS5710172A (en) Original size detecting method of copying machine
JPS56122905A (en) Optical detecting device for surface defect
JPS5382492A (en) Surface inspecting method
JPS52135788A (en) Detection of impurities
JPS5348789A (en) Vibration detector
JPS5377544A (en) Optical detector
JPS5566741A (en) Inspection device for board material having positive penetrating characteristic
JPS5288050A (en) Transparent object detecting method
JPS56122069A (en) Copying system using photodetector and light emitting element
JPS57207853A (en) Lighting device for inspecting thin plate having semitransmission characteristics
JPS5627117A (en) Light splitter
JPS6491025A (en) Optical device
JPS55116204A (en) Detecting edge part of black rubber object
JPS57103081A (en) Parts detector
JPS5287358A (en) Counting method for semiconductor pellets
JPS52106266A (en) Illumination panel