JPS57132330A - Processing method of groove in semiconductor - Google Patents
Processing method of groove in semiconductorInfo
- Publication number
- JPS57132330A JPS57132330A JP1853181A JP1853181A JPS57132330A JP S57132330 A JPS57132330 A JP S57132330A JP 1853181 A JP1853181 A JP 1853181A JP 1853181 A JP1853181 A JP 1853181A JP S57132330 A JPS57132330 A JP S57132330A
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor
- grindstone
- groove
- annular
- condition
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 title abstract 10
- 238000003672 processing method Methods 0.000 title 1
- 238000000034 method Methods 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67092—Apparatus for mechanical treatment
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/304—Mechanical treatment, e.g. grinding, polishing, cutting
- H01L21/3043—Making grooves, e.g. cutting
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
- Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1853181A JPS57132330A (en) | 1981-02-10 | 1981-02-10 | Processing method of groove in semiconductor |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1853181A JPS57132330A (en) | 1981-02-10 | 1981-02-10 | Processing method of groove in semiconductor |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS57132330A true JPS57132330A (en) | 1982-08-16 |
Family
ID=11974206
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1853181A Pending JPS57132330A (en) | 1981-02-10 | 1981-02-10 | Processing method of groove in semiconductor |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS57132330A (ja) |
-
1981
- 1981-02-10 JP JP1853181A patent/JPS57132330A/ja active Pending
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