JPS57127805A - Device for measuring three-dimensional shape - Google Patents
Device for measuring three-dimensional shapeInfo
- Publication number
- JPS57127805A JPS57127805A JP1328081A JP1328081A JPS57127805A JP S57127805 A JPS57127805 A JP S57127805A JP 1328081 A JP1328081 A JP 1328081A JP 1328081 A JP1328081 A JP 1328081A JP S57127805 A JPS57127805 A JP S57127805A
- Authority
- JP
- Japan
- Prior art keywords
- contact
- leading end
- probe
- radius
- measured
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
- G01B21/02—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness
- G01B21/04—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness by measuring coordinates of points
- G01B21/045—Correction of measurements
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
- Machine Tool Copy Controls (AREA)
Abstract
PURPOSE:To measure three-dimensional free curved surfaces with high accuracy and high efficiency by a device wherein an analog output type displacement detector is used and an error due to a contact at the leading end of a probe which has a finite radius is compensated with correction computing for the measurement of a three-dimensional shape. CONSTITUTION:A three-dimensional shape of a body 12 to be measured which has a three-dimensional free curved surface is measured. A spherical contact 16 at the leading end of a probe 11 comes into contact with the body 12 thereby to read coordinate values. If the contact 16 has its leading end tapered into an ideal needle-like shape, a leading end position of the probe should coincide with an actual measuring position. But, the contat is of a sphere having a finit radius R and a surface of the body is inclined with a slope theta, so that a geometrical error is caused. Therefore, displacements ex-epsilonz in rectangular three axial directions in the state the contact is in contact with the surface of the body are detected, and then correction amounts Hx-Hz are computed based on thus detected displacements and the radius R. Coordinate values X-Z of the measured position is compensated thereupon, thereby to obtain correct outputs XT-ZT.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1328081A JPS57127805A (en) | 1981-01-31 | 1981-01-31 | Device for measuring three-dimensional shape |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1328081A JPS57127805A (en) | 1981-01-31 | 1981-01-31 | Device for measuring three-dimensional shape |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS57127805A true JPS57127805A (en) | 1982-08-09 |
Family
ID=11828782
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1328081A Pending JPS57127805A (en) | 1981-01-31 | 1981-01-31 | Device for measuring three-dimensional shape |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS57127805A (en) |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62215814A (en) * | 1986-03-18 | 1987-09-22 | Nippon Kogaku Kk <Nikon> | Apparatus for measuring shape of lens fixing mold of frame of spectacles |
JPH0264404A (en) * | 1988-08-31 | 1990-03-05 | Okuma Mach Works Ltd | Correcting method for diameter of touch probe |
EP0638781A1 (en) * | 1993-08-07 | 1995-02-15 | Dr. Johannes Heidenhain GmbH | Calibration-procedure to determine and to compensate for the different measuring-forces in coördinate measuring machines |
JPH07239228A (en) * | 1994-02-28 | 1995-09-12 | Makino Milling Mach Co Ltd | Measuring method and device |
WO2004106854A1 (en) * | 2003-05-28 | 2004-12-09 | Carl Zeiss Industrielle Messtechnik Gmbh | Method for calibrating a probe |
JP2007500849A (en) * | 2003-05-28 | 2007-01-18 | カール ツァイス インドゥストリエレ メステヒニク ゲゼルシャフト ミット ベシュレンクテル ハフツング | Coordinate measuring apparatus, method, computer program product |
JP2008134112A (en) * | 2006-11-28 | 2008-06-12 | Canon Inc | Shape measuring apparatus |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS567008A (en) * | 1979-06-29 | 1981-01-24 | Shin Nippon Koki Kk | Tridimensional coordinates measuring apparatus |
-
1981
- 1981-01-31 JP JP1328081A patent/JPS57127805A/en active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS567008A (en) * | 1979-06-29 | 1981-01-24 | Shin Nippon Koki Kk | Tridimensional coordinates measuring apparatus |
Cited By (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62215814A (en) * | 1986-03-18 | 1987-09-22 | Nippon Kogaku Kk <Nikon> | Apparatus for measuring shape of lens fixing mold of frame of spectacles |
JPH0264404A (en) * | 1988-08-31 | 1990-03-05 | Okuma Mach Works Ltd | Correcting method for diameter of touch probe |
EP0638781A1 (en) * | 1993-08-07 | 1995-02-15 | Dr. Johannes Heidenhain GmbH | Calibration-procedure to determine and to compensate for the different measuring-forces in coördinate measuring machines |
JPH07239228A (en) * | 1994-02-28 | 1995-09-12 | Makino Milling Mach Co Ltd | Measuring method and device |
WO2004106854A1 (en) * | 2003-05-28 | 2004-12-09 | Carl Zeiss Industrielle Messtechnik Gmbh | Method for calibrating a probe |
JP2007500849A (en) * | 2003-05-28 | 2007-01-18 | カール ツァイス インドゥストリエレ メステヒニク ゲゼルシャフト ミット ベシュレンクテル ハフツング | Coordinate measuring apparatus, method, computer program product |
US7246448B2 (en) | 2003-05-28 | 2007-07-24 | Carl Zeiss Industrielle Messtechnik Gmbh | Method for calibrating a probe |
JP4845734B2 (en) * | 2003-05-28 | 2011-12-28 | カール・ツアイス・インダストリーエレ・メステクニク・ゲーエムベーハー | Coordinate measuring device, method, computer program and data carrier |
JP2008134112A (en) * | 2006-11-28 | 2008-06-12 | Canon Inc | Shape measuring apparatus |
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