JPS57127805A - Device for measuring three-dimensional shape - Google Patents

Device for measuring three-dimensional shape

Info

Publication number
JPS57127805A
JPS57127805A JP1328081A JP1328081A JPS57127805A JP S57127805 A JPS57127805 A JP S57127805A JP 1328081 A JP1328081 A JP 1328081A JP 1328081 A JP1328081 A JP 1328081A JP S57127805 A JPS57127805 A JP S57127805A
Authority
JP
Japan
Prior art keywords
contact
leading end
probe
radius
measured
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1328081A
Other languages
Japanese (ja)
Inventor
Seido Koda
Sumihiro Ushio
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
OOSAKA KIKOU KK
Osaka Kiko Co Ltd
Original Assignee
OOSAKA KIKOU KK
Osaka Kiko Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by OOSAKA KIKOU KK, Osaka Kiko Co Ltd filed Critical OOSAKA KIKOU KK
Priority to JP1328081A priority Critical patent/JPS57127805A/en
Publication of JPS57127805A publication Critical patent/JPS57127805A/en
Pending legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B21/00Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
    • G01B21/02Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness
    • G01B21/04Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness by measuring coordinates of points
    • G01B21/045Correction of measurements

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Machine Tool Copy Controls (AREA)

Abstract

PURPOSE:To measure three-dimensional free curved surfaces with high accuracy and high efficiency by a device wherein an analog output type displacement detector is used and an error due to a contact at the leading end of a probe which has a finite radius is compensated with correction computing for the measurement of a three-dimensional shape. CONSTITUTION:A three-dimensional shape of a body 12 to be measured which has a three-dimensional free curved surface is measured. A spherical contact 16 at the leading end of a probe 11 comes into contact with the body 12 thereby to read coordinate values. If the contact 16 has its leading end tapered into an ideal needle-like shape, a leading end position of the probe should coincide with an actual measuring position. But, the contat is of a sphere having a finit radius R and a surface of the body is inclined with a slope theta, so that a geometrical error is caused. Therefore, displacements ex-epsilonz in rectangular three axial directions in the state the contact is in contact with the surface of the body are detected, and then correction amounts Hx-Hz are computed based on thus detected displacements and the radius R. Coordinate values X-Z of the measured position is compensated thereupon, thereby to obtain correct outputs XT-ZT.
JP1328081A 1981-01-31 1981-01-31 Device for measuring three-dimensional shape Pending JPS57127805A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1328081A JPS57127805A (en) 1981-01-31 1981-01-31 Device for measuring three-dimensional shape

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1328081A JPS57127805A (en) 1981-01-31 1981-01-31 Device for measuring three-dimensional shape

Publications (1)

Publication Number Publication Date
JPS57127805A true JPS57127805A (en) 1982-08-09

Family

ID=11828782

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1328081A Pending JPS57127805A (en) 1981-01-31 1981-01-31 Device for measuring three-dimensional shape

Country Status (1)

Country Link
JP (1) JPS57127805A (en)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62215814A (en) * 1986-03-18 1987-09-22 Nippon Kogaku Kk <Nikon> Apparatus for measuring shape of lens fixing mold of frame of spectacles
JPH0264404A (en) * 1988-08-31 1990-03-05 Okuma Mach Works Ltd Correcting method for diameter of touch probe
EP0638781A1 (en) * 1993-08-07 1995-02-15 Dr. Johannes Heidenhain GmbH Calibration-procedure to determine and to compensate for the different measuring-forces in coördinate measuring machines
JPH07239228A (en) * 1994-02-28 1995-09-12 Makino Milling Mach Co Ltd Measuring method and device
WO2004106854A1 (en) * 2003-05-28 2004-12-09 Carl Zeiss Industrielle Messtechnik Gmbh Method for calibrating a probe
JP2007500849A (en) * 2003-05-28 2007-01-18 カール ツァイス インドゥストリエレ メステヒニク ゲゼルシャフト ミット ベシュレンクテル ハフツング Coordinate measuring apparatus, method, computer program product
JP2008134112A (en) * 2006-11-28 2008-06-12 Canon Inc Shape measuring apparatus

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS567008A (en) * 1979-06-29 1981-01-24 Shin Nippon Koki Kk Tridimensional coordinates measuring apparatus

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS567008A (en) * 1979-06-29 1981-01-24 Shin Nippon Koki Kk Tridimensional coordinates measuring apparatus

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62215814A (en) * 1986-03-18 1987-09-22 Nippon Kogaku Kk <Nikon> Apparatus for measuring shape of lens fixing mold of frame of spectacles
JPH0264404A (en) * 1988-08-31 1990-03-05 Okuma Mach Works Ltd Correcting method for diameter of touch probe
EP0638781A1 (en) * 1993-08-07 1995-02-15 Dr. Johannes Heidenhain GmbH Calibration-procedure to determine and to compensate for the different measuring-forces in coördinate measuring machines
JPH07239228A (en) * 1994-02-28 1995-09-12 Makino Milling Mach Co Ltd Measuring method and device
WO2004106854A1 (en) * 2003-05-28 2004-12-09 Carl Zeiss Industrielle Messtechnik Gmbh Method for calibrating a probe
JP2007500849A (en) * 2003-05-28 2007-01-18 カール ツァイス インドゥストリエレ メステヒニク ゲゼルシャフト ミット ベシュレンクテル ハフツング Coordinate measuring apparatus, method, computer program product
US7246448B2 (en) 2003-05-28 2007-07-24 Carl Zeiss Industrielle Messtechnik Gmbh Method for calibrating a probe
JP4845734B2 (en) * 2003-05-28 2011-12-28 カール・ツアイス・インダストリーエレ・メステクニク・ゲーエムベーハー Coordinate measuring device, method, computer program and data carrier
JP2008134112A (en) * 2006-11-28 2008-06-12 Canon Inc Shape measuring apparatus

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