JPS5712743U - - Google Patents
Info
- Publication number
- JPS5712743U JPS5712743U JP8779380U JP8779380U JPS5712743U JP S5712743 U JPS5712743 U JP S5712743U JP 8779380 U JP8779380 U JP 8779380U JP 8779380 U JP8779380 U JP 8779380U JP S5712743 U JPS5712743 U JP S5712743U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Load-Bearing And Curtain Walls (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1980087793U JPS6218033Y2 (en:Method) | 1980-06-23 | 1980-06-23 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1980087793U JPS6218033Y2 (en:Method) | 1980-06-23 | 1980-06-23 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5712743U true JPS5712743U (en:Method) | 1982-01-22 |
| JPS6218033Y2 JPS6218033Y2 (en:Method) | 1987-05-09 |
Family
ID=29449893
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1980087793U Expired JPS6218033Y2 (en:Method) | 1980-06-23 | 1980-06-23 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6218033Y2 (en:Method) |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5237966U (en:Method) * | 1975-09-10 | 1977-03-17 | ||
| JPS5252579A (en) * | 1975-10-27 | 1977-04-27 | Canon Inc | Clearance adjusng method |
| JPS52156452U (en:Method) * | 1976-05-22 | 1977-11-28 | ||
| JPS5381572U (en:Method) * | 1976-12-09 | 1978-07-06 | ||
| JPS5443480A (en) * | 1977-09-12 | 1979-04-06 | Hitachi Ltd | Mask aligner |
| JPS5485678A (en) * | 1977-12-20 | 1979-07-07 | Canon Inc | High accuracy alignment method for air bearing guide system xy stage |
| JPS5530823A (en) * | 1978-08-25 | 1980-03-04 | Nippon Telegr & Teleph Corp <Ntt> | Mask-wafer gap setting device |
-
1980
- 1980-06-23 JP JP1980087793U patent/JPS6218033Y2/ja not_active Expired
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5237966U (en:Method) * | 1975-09-10 | 1977-03-17 | ||
| JPS5252579A (en) * | 1975-10-27 | 1977-04-27 | Canon Inc | Clearance adjusng method |
| JPS52156452U (en:Method) * | 1976-05-22 | 1977-11-28 | ||
| JPS5381572U (en:Method) * | 1976-12-09 | 1978-07-06 | ||
| JPS5443480A (en) * | 1977-09-12 | 1979-04-06 | Hitachi Ltd | Mask aligner |
| JPS5485678A (en) * | 1977-12-20 | 1979-07-07 | Canon Inc | High accuracy alignment method for air bearing guide system xy stage |
| JPS5530823A (en) * | 1978-08-25 | 1980-03-04 | Nippon Telegr & Teleph Corp <Ntt> | Mask-wafer gap setting device |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6218033Y2 (en:Method) | 1987-05-09 |