JPS5712743U - - Google Patents

Info

Publication number
JPS5712743U
JPS5712743U JP8779380U JP8779380U JPS5712743U JP S5712743 U JPS5712743 U JP S5712743U JP 8779380 U JP8779380 U JP 8779380U JP 8779380 U JP8779380 U JP 8779380U JP S5712743 U JPS5712743 U JP S5712743U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8779380U
Other languages
Japanese (ja)
Other versions
JPS6218033Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1980087793U priority Critical patent/JPS6218033Y2/ja
Publication of JPS5712743U publication Critical patent/JPS5712743U/ja
Application granted granted Critical
Publication of JPS6218033Y2 publication Critical patent/JPS6218033Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Load-Bearing And Curtain Walls (AREA)
JP1980087793U 1980-06-23 1980-06-23 Expired JPS6218033Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1980087793U JPS6218033Y2 (enrdf_load_stackoverflow) 1980-06-23 1980-06-23

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1980087793U JPS6218033Y2 (enrdf_load_stackoverflow) 1980-06-23 1980-06-23

Publications (2)

Publication Number Publication Date
JPS5712743U true JPS5712743U (enrdf_load_stackoverflow) 1982-01-22
JPS6218033Y2 JPS6218033Y2 (enrdf_load_stackoverflow) 1987-05-09

Family

ID=29449893

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1980087793U Expired JPS6218033Y2 (enrdf_load_stackoverflow) 1980-06-23 1980-06-23

Country Status (1)

Country Link
JP (1) JPS6218033Y2 (enrdf_load_stackoverflow)

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5237966U (enrdf_load_stackoverflow) * 1975-09-10 1977-03-17
JPS5252579A (en) * 1975-10-27 1977-04-27 Canon Inc Clearance adjusng method
JPS52156452U (enrdf_load_stackoverflow) * 1976-05-22 1977-11-28
JPS5381572U (enrdf_load_stackoverflow) * 1976-12-09 1978-07-06
JPS5443480A (en) * 1977-09-12 1979-04-06 Hitachi Ltd Mask aligner
JPS5485678A (en) * 1977-12-20 1979-07-07 Canon Inc High accuracy alignment method for air bearing guide system xy stage
JPS5530823A (en) * 1978-08-25 1980-03-04 Nippon Telegr & Teleph Corp <Ntt> Mask-wafer gap setting device

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5237966U (enrdf_load_stackoverflow) * 1975-09-10 1977-03-17
JPS5252579A (en) * 1975-10-27 1977-04-27 Canon Inc Clearance adjusng method
JPS52156452U (enrdf_load_stackoverflow) * 1976-05-22 1977-11-28
JPS5381572U (enrdf_load_stackoverflow) * 1976-12-09 1978-07-06
JPS5443480A (en) * 1977-09-12 1979-04-06 Hitachi Ltd Mask aligner
JPS5485678A (en) * 1977-12-20 1979-07-07 Canon Inc High accuracy alignment method for air bearing guide system xy stage
JPS5530823A (en) * 1978-08-25 1980-03-04 Nippon Telegr & Teleph Corp <Ntt> Mask-wafer gap setting device

Also Published As

Publication number Publication date
JPS6218033Y2 (enrdf_load_stackoverflow) 1987-05-09

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