JPS57126056A - Scanning-type electronic microscope which can display plural sample images simultaneously, and device similar to it - Google Patents

Scanning-type electronic microscope which can display plural sample images simultaneously, and device similar to it

Info

Publication number
JPS57126056A
JPS57126056A JP56011810A JP1181081A JPS57126056A JP S57126056 A JPS57126056 A JP S57126056A JP 56011810 A JP56011810 A JP 56011810A JP 1181081 A JP1181081 A JP 1181081A JP S57126056 A JPS57126056 A JP S57126056A
Authority
JP
Japan
Prior art keywords
equipments
sample images
scanning
type electronic
device similar
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP56011810A
Other languages
English (en)
Other versions
JPS6246943B2 (ja
Inventor
Akira Onoguchi
Mitsuhisa Miyazawa
Shigetomo Yamazaki
Masahiro Inoue
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Akashi Seisakusho KK
Original Assignee
Akashi Seisakusho KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Akashi Seisakusho KK filed Critical Akashi Seisakusho KK
Priority to JP56011810A priority Critical patent/JPS57126056A/ja
Priority to US06/327,163 priority patent/US4420686A/en
Publication of JPS57126056A publication Critical patent/JPS57126056A/ja
Publication of JPS6246943B2 publication Critical patent/JPS6246943B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
JP56011810A 1981-01-29 1981-01-29 Scanning-type electronic microscope which can display plural sample images simultaneously, and device similar to it Granted JPS57126056A (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP56011810A JPS57126056A (en) 1981-01-29 1981-01-29 Scanning-type electronic microscope which can display plural sample images simultaneously, and device similar to it
US06/327,163 US4420686A (en) 1981-01-29 1981-12-03 Scanning electron microscope or similar equipment capable of displaying simultaneously a plurality of images of specimen

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56011810A JPS57126056A (en) 1981-01-29 1981-01-29 Scanning-type electronic microscope which can display plural sample images simultaneously, and device similar to it

Publications (2)

Publication Number Publication Date
JPS57126056A true JPS57126056A (en) 1982-08-05
JPS6246943B2 JPS6246943B2 (ja) 1987-10-05

Family

ID=11788172

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56011810A Granted JPS57126056A (en) 1981-01-29 1981-01-29 Scanning-type electronic microscope which can display plural sample images simultaneously, and device similar to it

Country Status (2)

Country Link
US (1) US4420686A (ja)
JP (1) JPS57126056A (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009026620A (ja) * 2007-07-20 2009-02-05 Hitachi High-Technologies Corp 小型カラム電子顕微鏡複合装置及び欠陥観察方法

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3403254A1 (de) * 1984-01-31 1985-08-01 Siemens AG, 1000 Berlin und 8000 München Verfahren und vorrichtung zur kompensation von aufladungen bei der sekundaerionen-massenspektrometrie (sims) elektrisch schlecht leitender proben
DE3482769D1 (de) * 1984-05-30 1990-08-23 Siemens Ag Verfahren und vorrichtung zur detektion und abbildung eines messpunkts, der eine spannung wenigstens einer bestimmten frequenz fuehrt.
EP0196534A1 (de) * 1985-03-22 1986-10-08 Siemens Aktiengesellschaft Verfahren zur Ermittlung der Signalfrequenzen an wenigstens einem Punkt einer Probe mittels eines Rastermikroskops und Anordnung zur Durchführung des Verfahrens
US4689555A (en) * 1985-03-22 1987-08-25 Siemens Aktiengesellschaft Method for the determination of points on a specimen carrying a specific signal frequency by use of a scanning microscope
JPH0682718B2 (ja) * 1985-08-12 1994-10-19 日本電信電話株式会社 電子デバイスの試験装置およびその使用方法
US4760567A (en) * 1986-08-11 1988-07-26 Electron Beam Memories Electron beam memory system with ultra-compact, high current density electron gun
US5557105A (en) * 1991-06-10 1996-09-17 Fujitsu Limited Pattern inspection apparatus and electron beam apparatus
DE69223088T2 (de) * 1991-06-10 1998-03-05 Fujitsu Ltd Apparat zur Musterüberprüfung und Elektronenstrahlgerät
US5212383A (en) * 1991-07-29 1993-05-18 David Scharf Color synthesizing scanning electron microscope
US6172363B1 (en) * 1996-03-05 2001-01-09 Hitachi, Ltd. Method and apparatus for inspecting integrated circuit pattern
US6353222B1 (en) 1998-09-03 2002-03-05 Applied Materials, Inc. Determining defect depth and contour information in wafer structures using multiple SEM images
US6740889B1 (en) * 1998-09-28 2004-05-25 Applied Materials, Inc. Charged particle beam microscope with minicolumn
US6583413B1 (en) * 1999-09-01 2003-06-24 Hitachi, Ltd. Method of inspecting a circuit pattern and inspecting instrument
US6515282B1 (en) * 2000-03-28 2003-02-04 Applied Materials, Inc. Testing of interconnection circuitry using two modulated charged particle beams
US6610980B2 (en) * 2000-05-15 2003-08-26 Kla-Tencor Corporation Apparatus for inspection of semiconductor wafers and masks using a low energy electron microscope with two illuminating beams
JP4408538B2 (ja) * 2000-07-24 2010-02-03 株式会社日立製作所 プローブ装置
US7288755B1 (en) 2001-10-19 2007-10-30 Brian P. Platner Portable handheld artificial light detector
US20030210262A1 (en) * 2002-05-10 2003-11-13 Tripath Imaging, Inc. Video microscopy system and multi-view virtual slide viewer capable of simultaneously acquiring and displaying various digital views of an area of interest located on a microscopic slide
US6812462B1 (en) * 2003-02-21 2004-11-02 Kla-Tencor Technologies Corporation Dual electron beam instrument for multi-perspective
JP5059297B2 (ja) * 2005-05-09 2012-10-24 株式会社日立ハイテクノロジーズ 電子線式観察装置
US8735030B2 (en) 2010-04-15 2014-05-27 Carl Zeiss Smt Gmbh Method and apparatus for modifying a substrate surface of a photolithographic mask
US9165742B1 (en) 2014-10-10 2015-10-20 Kla-Tencor Corporation Inspection site preparation
US10403471B2 (en) 2017-11-29 2019-09-03 Asml Netherlands B.V. Systems and methods for charged particle beam modulation
KR20240055696A (ko) * 2021-04-16 2024-04-29 인터그레이티드 다이나믹 일렉트론 솔루션즈, 인크. 전자 현미경 기술을 위한 임의의 전자 선량 파형
US11848173B1 (en) 2023-01-31 2023-12-19 Integrated Dynamic Electron Solutions, Inc. Methods and systems for event modulated electron microscopy

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1315945A (en) * 1971-02-12 1973-05-09 Cambridge Scientific Instr Ltd Electron microscopes and microanalysers
JPS51134558A (en) * 1975-05-19 1976-11-22 Hitachi Ltd Measuring unit

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009026620A (ja) * 2007-07-20 2009-02-05 Hitachi High-Technologies Corp 小型カラム電子顕微鏡複合装置及び欠陥観察方法

Also Published As

Publication number Publication date
JPS6246943B2 (ja) 1987-10-05
US4420686A (en) 1983-12-13

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