JPS57124841A - X-ray source - Google Patents

X-ray source

Info

Publication number
JPS57124841A
JPS57124841A JP56011448A JP1144881A JPS57124841A JP S57124841 A JPS57124841 A JP S57124841A JP 56011448 A JP56011448 A JP 56011448A JP 1144881 A JP1144881 A JP 1144881A JP S57124841 A JPS57124841 A JP S57124841A
Authority
JP
Japan
Prior art keywords
electrodes
discharge
wall
hole
ray source
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP56011448A
Other languages
Japanese (ja)
Inventor
Yoshitaka Kitamura
Masahiro Okabe
Yasuo Furukawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP56011448A priority Critical patent/JPS57124841A/en
Publication of JPS57124841A publication Critical patent/JPS57124841A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor

Landscapes

  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • X-Ray Techniques (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Plasma Technology (AREA)

Abstract

PURPOSE:To enable discharge to be initiated at any time by an X-ray source, which initiates creeping discharge on the inner wall of a penetrating hole, and prevent any vibration of discharge current by making trigger discharge to be carried out with electrodes installed on the opposite side of a cathode. CONSTITUTION:Electrodes 8 and 9 are installed so that they are located on the opposite side of a cathode 5 relative to electrodes 1 and 2, which are placed with an insulator 3 interposed between them. After electric energy is accumulated in condensers C1 and C2 until no creeping discharge is caused on the inner wall of a penetrating hole 10 across the electrodes 1 and 2, which face to each other with the hole 10 interposed between them, electric energy accumulated in a cndenser C3 is discharged across the electrodes 8 and 9. As a result, the electric field between the electrodes 1 and 2 becomes unbalanced, and creeping discharge is developed across the electrodes 1 and 2, along the inner wall of the hole 10.
JP56011448A 1981-01-28 1981-01-28 X-ray source Pending JPS57124841A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56011448A JPS57124841A (en) 1981-01-28 1981-01-28 X-ray source

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56011448A JPS57124841A (en) 1981-01-28 1981-01-28 X-ray source

Publications (1)

Publication Number Publication Date
JPS57124841A true JPS57124841A (en) 1982-08-03

Family

ID=11778369

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56011448A Pending JPS57124841A (en) 1981-01-28 1981-01-28 X-ray source

Country Status (1)

Country Link
JP (1) JPS57124841A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6240163B1 (en) 1998-06-19 2001-05-29 Advanced Laser & Fusion Technology Radiation E.G. X-ray pulse generator mechanisms

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6240163B1 (en) 1998-06-19 2001-05-29 Advanced Laser & Fusion Technology Radiation E.G. X-ray pulse generator mechanisms

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