JPS57124237A - Humidity sensor - Google Patents

Humidity sensor

Info

Publication number
JPS57124237A
JPS57124237A JP932981A JP932981A JPS57124237A JP S57124237 A JPS57124237 A JP S57124237A JP 932981 A JP932981 A JP 932981A JP 932981 A JP932981 A JP 932981A JP S57124237 A JPS57124237 A JP S57124237A
Authority
JP
Japan
Prior art keywords
resonance frequencies
change
humidity sensor
stem
electrodes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP932981A
Other languages
Japanese (ja)
Inventor
Takeshi Nakamura
Koji Nishiyama
Tasuku Masuo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Priority to JP932981A priority Critical patent/JPS57124237A/en
Publication of JPS57124237A publication Critical patent/JPS57124237A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/02—Analysing fluids
    • G01N29/036—Analysing fluids by measuring frequency or resonance of acoustic waves
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/02—Indexing codes associated with the analysed material
    • G01N2291/025—Change of phase or condition
    • G01N2291/0256—Adsorption, desorption, surface mass change, e.g. on biosensors

Abstract

PURPOSE:To obtain a humidity sensor having characteristics wherein resonance frequencies change roughly linearly with a change in humudity by forming piezoelectric films and electrodes on an oscillator body consisting of beryllium copper. CONSTITUTION:Piezoelectric films 2 are formed on the parts where oscillations are produced of an oscillator body 1 of tuning fork type consisting of copper beryllium and electrodes 3 are formed by a dry plating method on the films 2. This body 1 is grasped and fixed to support bars 5, 6 of a stem 4, and the bar 5 is used as a lead terminal. Other lead terminal 7 is fixed to the stem 4. A cover is put on this humidity sensor, and a gauge is mounted to the outside surface of the cover. With one end thereof held immersed in water, resonance frequencies are measured and relative humidity is determined. Thereby, the rate of change in the resonance frequencies with respect to relative humidity is made roughly linear, and the need for intricate correction circuits is eliminated.
JP932981A 1981-01-23 1981-01-23 Humidity sensor Pending JPS57124237A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP932981A JPS57124237A (en) 1981-01-23 1981-01-23 Humidity sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP932981A JPS57124237A (en) 1981-01-23 1981-01-23 Humidity sensor

Publications (1)

Publication Number Publication Date
JPS57124237A true JPS57124237A (en) 1982-08-03

Family

ID=11717426

Family Applications (1)

Application Number Title Priority Date Filing Date
JP932981A Pending JPS57124237A (en) 1981-01-23 1981-01-23 Humidity sensor

Country Status (1)

Country Link
JP (1) JPS57124237A (en)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5135180B2 (en) * 1972-04-14 1976-09-30

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5135180B2 (en) * 1972-04-14 1976-09-30

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