JPS57124145U - - Google Patents
Info
- Publication number
- JPS57124145U JPS57124145U JP918281U JP918281U JPS57124145U JP S57124145 U JPS57124145 U JP S57124145U JP 918281 U JP918281 U JP 918281U JP 918281 U JP918281 U JP 918281U JP S57124145 U JPS57124145 U JP S57124145U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Drying Of Solid Materials (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1981009182U JPS6218034Y2 (https=) | 1981-01-27 | 1981-01-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1981009182U JPS6218034Y2 (https=) | 1981-01-27 | 1981-01-27 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS57124145U true JPS57124145U (https=) | 1982-08-03 |
| JPS6218034Y2 JPS6218034Y2 (https=) | 1987-05-09 |
Family
ID=29807317
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1981009182U Expired JPS6218034Y2 (https=) | 1981-01-27 | 1981-01-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6218034Y2 (https=) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63177034U (https=) * | 1987-05-06 | 1988-11-16 | ||
| JPH01255227A (ja) * | 1988-04-04 | 1989-10-12 | Dainippon Screen Mfg Co Ltd | 基板の回転式表面処理装置 |
| JPH06112186A (ja) * | 1992-09-25 | 1994-04-22 | Dainippon Screen Mfg Co Ltd | 横軸回転式基板乾燥装置 |
| JPH07176513A (ja) * | 1994-10-06 | 1995-07-14 | Dainippon Screen Mfg Co Ltd | 基板処理装置 |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5249504U (https=) * | 1975-10-07 | 1977-04-08 | ||
| JPS5295165A (en) * | 1976-02-06 | 1977-08-10 | Hitachi Ltd | Wafer cleansing tool |
| JPS55115332A (en) * | 1979-02-26 | 1980-09-05 | Mitsubishi Electric Corp | Washing and drying apparatus for photomask |
-
1981
- 1981-01-27 JP JP1981009182U patent/JPS6218034Y2/ja not_active Expired
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5249504U (https=) * | 1975-10-07 | 1977-04-08 | ||
| JPS5295165A (en) * | 1976-02-06 | 1977-08-10 | Hitachi Ltd | Wafer cleansing tool |
| JPS55115332A (en) * | 1979-02-26 | 1980-09-05 | Mitsubishi Electric Corp | Washing and drying apparatus for photomask |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63177034U (https=) * | 1987-05-06 | 1988-11-16 | ||
| JPH01255227A (ja) * | 1988-04-04 | 1989-10-12 | Dainippon Screen Mfg Co Ltd | 基板の回転式表面処理装置 |
| JPH06112186A (ja) * | 1992-09-25 | 1994-04-22 | Dainippon Screen Mfg Co Ltd | 横軸回転式基板乾燥装置 |
| JPH07176513A (ja) * | 1994-10-06 | 1995-07-14 | Dainippon Screen Mfg Co Ltd | 基板処理装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6218034Y2 (https=) | 1987-05-09 |