JPS57120668A - Method and apparatus for forming thin polymer film - Google Patents

Method and apparatus for forming thin polymer film

Info

Publication number
JPS57120668A
JPS57120668A JP526281A JP526281A JPS57120668A JP S57120668 A JPS57120668 A JP S57120668A JP 526281 A JP526281 A JP 526281A JP 526281 A JP526281 A JP 526281A JP S57120668 A JPS57120668 A JP S57120668A
Authority
JP
Japan
Prior art keywords
electret
thin film
cooling
polymer
polymer film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP526281A
Other languages
Japanese (ja)
Other versions
JPH0224906B2 (en
Inventor
Koichi Shinohara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP526281A priority Critical patent/JPS57120668A/en
Publication of JPS57120668A publication Critical patent/JPS57120668A/en
Publication of JPH0224906B2 publication Critical patent/JPH0224906B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target

Abstract

PURPOSE:To enable the use of a polymer with a low heat diffusion rate and to enhance the endurance of a thin film applied produce by enabling the cooling of a target when a thin film is formed on the surface of an object by sputtering. CONSTITUTION:The titled apparatus is composed of a mechanism transferring an object 3 on which a thin polymer film is formed in a vacuum vessel 1, a flexible electret, a mechanism cooling the electret, and a mechanism 9 generating magnetism. Said electret is used as a target 4, and the adhesion to a cooling jacket 6 is increased by static electricity or the like to efficiently cool a polymer molding. Thus, a thin film applied product with superior endurance is obtd. efficiently.
JP526281A 1981-01-16 1981-01-16 Method and apparatus for forming thin polymer film Granted JPS57120668A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP526281A JPS57120668A (en) 1981-01-16 1981-01-16 Method and apparatus for forming thin polymer film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP526281A JPS57120668A (en) 1981-01-16 1981-01-16 Method and apparatus for forming thin polymer film

Publications (2)

Publication Number Publication Date
JPS57120668A true JPS57120668A (en) 1982-07-27
JPH0224906B2 JPH0224906B2 (en) 1990-05-31

Family

ID=11606309

Family Applications (1)

Application Number Title Priority Date Filing Date
JP526281A Granted JPS57120668A (en) 1981-01-16 1981-01-16 Method and apparatus for forming thin polymer film

Country Status (1)

Country Link
JP (1) JPS57120668A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5825476A (en) * 1981-07-16 1983-02-15 アムペツクス・コ−ポレ−シヨン High speed sputtering device and method

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5825476A (en) * 1981-07-16 1983-02-15 アムペツクス・コ−ポレ−シヨン High speed sputtering device and method
JPH0236675B2 (en) * 1981-07-16 1990-08-20 Ampex

Also Published As

Publication number Publication date
JPH0224906B2 (en) 1990-05-31

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