JPS51136584A - Apparatus for forming high-hardness film on metal surfaces - Google Patents

Apparatus for forming high-hardness film on metal surfaces

Info

Publication number
JPS51136584A
JPS51136584A JP6137775A JP6137775A JPS51136584A JP S51136584 A JPS51136584 A JP S51136584A JP 6137775 A JP6137775 A JP 6137775A JP 6137775 A JP6137775 A JP 6137775A JP S51136584 A JPS51136584 A JP S51136584A
Authority
JP
Japan
Prior art keywords
metal surfaces
forming high
hardness film
hardness
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6137775A
Other languages
Japanese (ja)
Inventor
Yasushi Kawashita
Masami Nakasone
Akira Suzuki
Yasuhiro Sasai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shinko Seiki Co Ltd
Original Assignee
Shinko Seiki Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shinko Seiki Co Ltd filed Critical Shinko Seiki Co Ltd
Priority to JP6137775A priority Critical patent/JPS51136584A/en
Publication of JPS51136584A publication Critical patent/JPS51136584A/en
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/0021—Reactive sputtering or evaporation

Abstract

PURPOSE:An apparatus for forming a high-hardness film such as TiC, TiN on an article at a temperature of 500 deg.C or under without degrading the hardness and mechanical strength of that material.
JP6137775A 1975-05-21 1975-05-21 Apparatus for forming high-hardness film on metal surfaces Pending JPS51136584A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6137775A JPS51136584A (en) 1975-05-21 1975-05-21 Apparatus for forming high-hardness film on metal surfaces

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6137775A JPS51136584A (en) 1975-05-21 1975-05-21 Apparatus for forming high-hardness film on metal surfaces

Publications (1)

Publication Number Publication Date
JPS51136584A true JPS51136584A (en) 1976-11-26

Family

ID=13169417

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6137775A Pending JPS51136584A (en) 1975-05-21 1975-05-21 Apparatus for forming high-hardness film on metal surfaces

Country Status (1)

Country Link
JP (1) JPS51136584A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS546877A (en) * 1977-06-17 1979-01-19 Shinko Seiki Method of forming colored coat over metal surface
JPS56156767A (en) * 1980-05-02 1981-12-03 Sumitomo Electric Ind Ltd Highly hard substance covering material

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS546877A (en) * 1977-06-17 1979-01-19 Shinko Seiki Method of forming colored coat over metal surface
JPS5527621B2 (en) * 1977-06-17 1980-07-22
JPS56156767A (en) * 1980-05-02 1981-12-03 Sumitomo Electric Ind Ltd Highly hard substance covering material
JPS6319590B2 (en) * 1980-05-02 1988-04-23 Sumitomo Electric Industries

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