JPS57116947A - Vibration preventing structure for vacuum apparatus - Google Patents

Vibration preventing structure for vacuum apparatus

Info

Publication number
JPS57116947A
JPS57116947A JP55187857A JP18785780A JPS57116947A JP S57116947 A JPS57116947 A JP S57116947A JP 55187857 A JP55187857 A JP 55187857A JP 18785780 A JP18785780 A JP 18785780A JP S57116947 A JPS57116947 A JP S57116947A
Authority
JP
Japan
Prior art keywords
pendulum
movable plate
pendulum motion
gimbals mechanism
pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP55187857A
Other languages
Japanese (ja)
Other versions
JPS6129420B2 (en
Inventor
Yoshio Watanabe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP55187857A priority Critical patent/JPS57116947A/en
Publication of JPS57116947A publication Critical patent/JPS57116947A/en
Publication of JPS6129420B2 publication Critical patent/JPS6129420B2/ja
Granted legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
    • F16F15/00—Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion
    • F16F15/02—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Aviation & Aerospace Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Joints Allowing Movement (AREA)
  • Vibration Prevention Devices (AREA)

Abstract

PURPOSE:To enable to absorb vibrations as pendulum motion and enable to perfectly prevent vibrations by a method wherein a vacuum pump is supported by a gimbals mechanism in such a manner that the pump can perform pendulum motions in all directions. CONSTITUTION:The gimbals mechanism 5 comprises a rectangular first movable plate 6 and an annular second movable plate 7 which are placed on the upper and lower sides, respectively, and are connected to each other by a pair of links 8a, 8b provided on opposite sides of a center point O on X-axis, the first movable plate 6 being connected to a stand 10 by a pair of links 9a, 9b provided on opposite sides of a center point O on Y-axis. A cryogenic pump 3, accompanied by rotational movements of the movable plates 6, 7, constitutes a pendulum system capable of performing the pendulum motion in all directions of circumference (360 deg.). The pendulum motion is absorbed by the gimbals mechanism 5.
JP55187857A 1980-12-29 1980-12-29 Vibration preventing structure for vacuum apparatus Granted JPS57116947A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP55187857A JPS57116947A (en) 1980-12-29 1980-12-29 Vibration preventing structure for vacuum apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP55187857A JPS57116947A (en) 1980-12-29 1980-12-29 Vibration preventing structure for vacuum apparatus

Publications (2)

Publication Number Publication Date
JPS57116947A true JPS57116947A (en) 1982-07-21
JPS6129420B2 JPS6129420B2 (en) 1986-07-07

Family

ID=16213421

Family Applications (1)

Application Number Title Priority Date Filing Date
JP55187857A Granted JPS57116947A (en) 1980-12-29 1980-12-29 Vibration preventing structure for vacuum apparatus

Country Status (1)

Country Link
JP (1) JPS57116947A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7879149B2 (en) 2003-03-11 2011-02-01 Sharp Kabushiki Kaisha Vacuum processing apparatus

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7879149B2 (en) 2003-03-11 2011-02-01 Sharp Kabushiki Kaisha Vacuum processing apparatus

Also Published As

Publication number Publication date
JPS6129420B2 (en) 1986-07-07

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