JPS57114102A - Forming method of fresnel ring zone plate - Google Patents

Forming method of fresnel ring zone plate

Info

Publication number
JPS57114102A
JPS57114102A JP56000121A JP12181A JPS57114102A JP S57114102 A JPS57114102 A JP S57114102A JP 56000121 A JP56000121 A JP 56000121A JP 12181 A JP12181 A JP 12181A JP S57114102 A JPS57114102 A JP S57114102A
Authority
JP
Japan
Prior art keywords
ring zone
beams
zone plate
fresnel ring
rays
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP56000121A
Other languages
Japanese (ja)
Inventor
Shigeru Yasuami
Yoichi Unno
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP56000121A priority Critical patent/JPS57114102A/en
Publication of JPS57114102A publication Critical patent/JPS57114102A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
    • G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
    • G21K1/00—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating
    • G21K1/06—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating using diffraction, refraction or reflection, e.g. monochromators

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • High Energy & Nuclear Physics (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)

Abstract

PURPOSE:To obtain a Fresnel ring zone plate for X rays, by forming a concentric pattern of a Fresnel ring zone plate which is caused by the intereference of a spherical wave and parallel beams of the interfering beams in a visble range and then reducing the pattern down to a level suitable to an X-ray wavelength. CONSTITUTION:A visible beam sent from a laser beam source is splitted to two beams by a semitransparent mirror 1. One of these two beams is focused to a focal point of a lens 9 via a mirror 6, lens systems 7 and 8 plus a mirror 5 and then turned into a spherical wave to iradiate a photographic plate 12. The other beam irradiates the plate 12 as a parallel beam via the mirrors 3 and 4, lenses 10 and 11 plus a semitransparent mirror 2. The mirrors 3 and 4 are controlled with the observation through a telescope 13 so as to obtain the minimum or maximum intensity at the center part A. Thus obtained pattern of hologram is reduced down to a level suited to the wavelength of X rays. In such way, a Fresnel ring zone plate for X rays is obtained.
JP56000121A 1981-01-06 1981-01-06 Forming method of fresnel ring zone plate Pending JPS57114102A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56000121A JPS57114102A (en) 1981-01-06 1981-01-06 Forming method of fresnel ring zone plate

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56000121A JPS57114102A (en) 1981-01-06 1981-01-06 Forming method of fresnel ring zone plate

Publications (1)

Publication Number Publication Date
JPS57114102A true JPS57114102A (en) 1982-07-15

Family

ID=11465202

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56000121A Pending JPS57114102A (en) 1981-01-06 1981-01-06 Forming method of fresnel ring zone plate

Country Status (1)

Country Link
JP (1) JPS57114102A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1987000644A1 (en) * 1985-07-19 1987-01-29 Shimadzu Corporation Soft x-ray lithographic system

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1987000644A1 (en) * 1985-07-19 1987-01-29 Shimadzu Corporation Soft x-ray lithographic system

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