JPS57113356A - Article inspection system - Google Patents

Article inspection system

Info

Publication number
JPS57113356A
JPS57113356A JP18954380A JP18954380A JPS57113356A JP S57113356 A JPS57113356 A JP S57113356A JP 18954380 A JP18954380 A JP 18954380A JP 18954380 A JP18954380 A JP 18954380A JP S57113356 A JPS57113356 A JP S57113356A
Authority
JP
Japan
Prior art keywords
video
article
taken
side container
sent
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP18954380A
Other languages
Japanese (ja)
Other versions
JPH0160944B2 (en
Inventor
Masahito Nakajima
Tetsuo Hizuka
Masato Miyamura
Yushi Inagaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP18954380A priority Critical patent/JPS57113356A/en
Publication of JPS57113356A publication Critical patent/JPS57113356A/en
Publication of JPH0160944B2 publication Critical patent/JPH0160944B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)

Abstract

PURPOSE:To enable inspection of an article simply and easily by comparing video signals of the article taken in the camera system before and after the working and stored in memory. CONSTITUTION:A semiconductor device 1 to be inspected is carried with a conveying device 11 from a supply side container 12 to a receiving side container 13 and the position thereof is detected by a position detection mark while taken with a TV camera 14. The semiconductor 1 is sent to an operation area of a wire bonder 15 correcting the deviation in the position by position matching the video A1 thus obtained with the data of the reference pad section and undergoes a wire bonding. Thereafter, it is returned to the position of taking the picture where a video A2 after the working is taken. The video A2 is compared with the video A1 stored in a memory 21 to inspect and then, the semiconductor device 1 is sent into a specified receiving side container 13. This enables inspection of the article simply by two-dimensional position matching without taking account of the rotation, inclination, difference in nature and the like of the article.
JP18954380A 1980-12-30 1980-12-30 Article inspection system Granted JPS57113356A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18954380A JPS57113356A (en) 1980-12-30 1980-12-30 Article inspection system

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18954380A JPS57113356A (en) 1980-12-30 1980-12-30 Article inspection system

Publications (2)

Publication Number Publication Date
JPS57113356A true JPS57113356A (en) 1982-07-14
JPH0160944B2 JPH0160944B2 (en) 1989-12-26

Family

ID=16243064

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18954380A Granted JPS57113356A (en) 1980-12-30 1980-12-30 Article inspection system

Country Status (1)

Country Link
JP (1) JPS57113356A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5942436A (en) * 1982-08-09 1984-03-09 Sumitomo Electric Ind Ltd Method for inspecting solderless terminal
JPS61193053A (en) * 1985-02-22 1986-08-27 Hitachi Ltd Method for inspection by image processing
JPS63135848A (en) * 1986-11-28 1988-06-08 Hitachi Ltd Defect inspection instrument
JPH04263233A (en) * 1991-02-18 1992-09-18 Ushio Kk Image processor
CN110118777A (en) * 2019-04-30 2019-08-13 北京航天自动控制研究所 A kind of control system system integration Smart Verify platform

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0357138U (en) * 1989-10-09 1991-05-31

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5588347A (en) * 1978-12-27 1980-07-04 Fujitsu Ltd Automatic aligning system
JPS55165647A (en) * 1979-06-11 1980-12-24 Mitsubishi Electric Corp Device for automatically detecting whether wire bonding position is right or wrong

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5588347A (en) * 1978-12-27 1980-07-04 Fujitsu Ltd Automatic aligning system
JPS55165647A (en) * 1979-06-11 1980-12-24 Mitsubishi Electric Corp Device for automatically detecting whether wire bonding position is right or wrong

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5942436A (en) * 1982-08-09 1984-03-09 Sumitomo Electric Ind Ltd Method for inspecting solderless terminal
JPH0515977B2 (en) * 1982-08-09 1993-03-03 Sumitomo Denki Kogyo Kk
JPS61193053A (en) * 1985-02-22 1986-08-27 Hitachi Ltd Method for inspection by image processing
JPS63135848A (en) * 1986-11-28 1988-06-08 Hitachi Ltd Defect inspection instrument
JPH04263233A (en) * 1991-02-18 1992-09-18 Ushio Kk Image processor
CN110118777A (en) * 2019-04-30 2019-08-13 北京航天自动控制研究所 A kind of control system system integration Smart Verify platform

Also Published As

Publication number Publication date
JPH0160944B2 (en) 1989-12-26

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