JPS57113356A - Article inspection system - Google Patents
Article inspection systemInfo
- Publication number
- JPS57113356A JPS57113356A JP18954380A JP18954380A JPS57113356A JP S57113356 A JPS57113356 A JP S57113356A JP 18954380 A JP18954380 A JP 18954380A JP 18954380 A JP18954380 A JP 18954380A JP S57113356 A JPS57113356 A JP S57113356A
- Authority
- JP
- Japan
- Prior art keywords
- video
- article
- taken
- side container
- sent
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/956—Inspecting patterns on the surface of objects
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Abstract
PURPOSE:To enable inspection of an article simply and easily by comparing video signals of the article taken in the camera system before and after the working and stored in memory. CONSTITUTION:A semiconductor device 1 to be inspected is carried with a conveying device 11 from a supply side container 12 to a receiving side container 13 and the position thereof is detected by a position detection mark while taken with a TV camera 14. The semiconductor 1 is sent to an operation area of a wire bonder 15 correcting the deviation in the position by position matching the video A1 thus obtained with the data of the reference pad section and undergoes a wire bonding. Thereafter, it is returned to the position of taking the picture where a video A2 after the working is taken. The video A2 is compared with the video A1 stored in a memory 21 to inspect and then, the semiconductor device 1 is sent into a specified receiving side container 13. This enables inspection of the article simply by two-dimensional position matching without taking account of the rotation, inclination, difference in nature and the like of the article.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP18954380A JPS57113356A (en) | 1980-12-30 | 1980-12-30 | Article inspection system |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP18954380A JPS57113356A (en) | 1980-12-30 | 1980-12-30 | Article inspection system |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS57113356A true JPS57113356A (en) | 1982-07-14 |
JPH0160944B2 JPH0160944B2 (en) | 1989-12-26 |
Family
ID=16243064
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP18954380A Granted JPS57113356A (en) | 1980-12-30 | 1980-12-30 | Article inspection system |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS57113356A (en) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5942436A (en) * | 1982-08-09 | 1984-03-09 | Sumitomo Electric Ind Ltd | Method for inspecting solderless terminal |
JPS61193053A (en) * | 1985-02-22 | 1986-08-27 | Hitachi Ltd | Method for inspection by image processing |
JPS63135848A (en) * | 1986-11-28 | 1988-06-08 | Hitachi Ltd | Defect inspection instrument |
JPH04263233A (en) * | 1991-02-18 | 1992-09-18 | Ushio Kk | Image processor |
CN110118777A (en) * | 2019-04-30 | 2019-08-13 | 北京航天自动控制研究所 | A kind of control system system integration Smart Verify platform |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0357138U (en) * | 1989-10-09 | 1991-05-31 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5588347A (en) * | 1978-12-27 | 1980-07-04 | Fujitsu Ltd | Automatic aligning system |
JPS55165647A (en) * | 1979-06-11 | 1980-12-24 | Mitsubishi Electric Corp | Device for automatically detecting whether wire bonding position is right or wrong |
-
1980
- 1980-12-30 JP JP18954380A patent/JPS57113356A/en active Granted
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5588347A (en) * | 1978-12-27 | 1980-07-04 | Fujitsu Ltd | Automatic aligning system |
JPS55165647A (en) * | 1979-06-11 | 1980-12-24 | Mitsubishi Electric Corp | Device for automatically detecting whether wire bonding position is right or wrong |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5942436A (en) * | 1982-08-09 | 1984-03-09 | Sumitomo Electric Ind Ltd | Method for inspecting solderless terminal |
JPH0515977B2 (en) * | 1982-08-09 | 1993-03-03 | Sumitomo Denki Kogyo Kk | |
JPS61193053A (en) * | 1985-02-22 | 1986-08-27 | Hitachi Ltd | Method for inspection by image processing |
JPS63135848A (en) * | 1986-11-28 | 1988-06-08 | Hitachi Ltd | Defect inspection instrument |
JPH04263233A (en) * | 1991-02-18 | 1992-09-18 | Ushio Kk | Image processor |
CN110118777A (en) * | 2019-04-30 | 2019-08-13 | 北京航天自动控制研究所 | A kind of control system system integration Smart Verify platform |
Also Published As
Publication number | Publication date |
---|---|
JPH0160944B2 (en) | 1989-12-26 |
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