JPS57112744A - Photoresist - Google Patents

Photoresist

Info

Publication number
JPS57112744A
JPS57112744A JP18723780A JP18723780A JPS57112744A JP S57112744 A JPS57112744 A JP S57112744A JP 18723780 A JP18723780 A JP 18723780A JP 18723780 A JP18723780 A JP 18723780A JP S57112744 A JPS57112744 A JP S57112744A
Authority
JP
Japan
Prior art keywords
resist
type resist
ultraviolet rays
electron beams
photoresist
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP18723780A
Other languages
English (en)
Other versions
JPH033210B2 (ja
Inventor
Akira Morishige
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP18723780A priority Critical patent/JPS57112744A/ja
Publication of JPS57112744A publication Critical patent/JPS57112744A/ja
Publication of JPH033210B2 publication Critical patent/JPH033210B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/09—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers
    • G03F7/105—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers having substances, e.g. indicators, for forming visible images

Landscapes

  • Engineering & Computer Science (AREA)
  • Architecture (AREA)
  • Structural Engineering (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Non-Silver Salt Photosensitive Materials And Non-Silver Salt Photography (AREA)
  • Electron Beam Exposure (AREA)
JP18723780A 1980-12-29 1980-12-29 Photoresist Granted JPS57112744A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18723780A JPS57112744A (en) 1980-12-29 1980-12-29 Photoresist

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18723780A JPS57112744A (en) 1980-12-29 1980-12-29 Photoresist

Publications (2)

Publication Number Publication Date
JPS57112744A true JPS57112744A (en) 1982-07-13
JPH033210B2 JPH033210B2 (ja) 1991-01-18

Family

ID=16202448

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18723780A Granted JPS57112744A (en) 1980-12-29 1980-12-29 Photoresist

Country Status (1)

Country Link
JP (1) JPS57112744A (ja)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5379528A (en) * 1976-12-23 1978-07-14 Fujitsu Ltd Pattern formation process
JPS5559455A (en) * 1978-10-25 1980-05-02 Fuji Photo Film Co Ltd Image formation method
JPS55110240A (en) * 1979-02-19 1980-08-25 Fujitsu Ltd Photoresist

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5379528A (en) * 1976-12-23 1978-07-14 Fujitsu Ltd Pattern formation process
JPS5559455A (en) * 1978-10-25 1980-05-02 Fuji Photo Film Co Ltd Image formation method
JPS55110240A (en) * 1979-02-19 1980-08-25 Fujitsu Ltd Photoresist

Also Published As

Publication number Publication date
JPH033210B2 (ja) 1991-01-18

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