JPS57106803A - Measuring device for thickness of film - Google Patents
Measuring device for thickness of filmInfo
- Publication number
- JPS57106803A JPS57106803A JP18279680A JP18279680A JPS57106803A JP S57106803 A JPS57106803 A JP S57106803A JP 18279680 A JP18279680 A JP 18279680A JP 18279680 A JP18279680 A JP 18279680A JP S57106803 A JPS57106803 A JP S57106803A
- Authority
- JP
- Japan
- Prior art keywords
- film
- thickness
- capacitor
- electrodes
- contact
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
- G01B7/06—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness
- G01B7/08—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness using capacitive means
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP18279680A JPS607203B2 (ja) | 1980-12-25 | 1980-12-25 | 膜厚測定器 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP18279680A JPS607203B2 (ja) | 1980-12-25 | 1980-12-25 | 膜厚測定器 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS57106803A true JPS57106803A (en) | 1982-07-02 |
JPS607203B2 JPS607203B2 (ja) | 1985-02-22 |
Family
ID=16124562
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP18279680A Expired JPS607203B2 (ja) | 1980-12-25 | 1980-12-25 | 膜厚測定器 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS607203B2 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
RU2652156C2 (ru) * | 2016-08-03 | 2018-04-25 | Алексей Владимирович Хорват | Способ измерения толщины тонкопленочных диэлектрических материалов |
-
1980
- 1980-12-25 JP JP18279680A patent/JPS607203B2/ja not_active Expired
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
RU2652156C2 (ru) * | 2016-08-03 | 2018-04-25 | Алексей Владимирович Хорват | Способ измерения толщины тонкопленочных диэлектрических материалов |
Also Published As
Publication number | Publication date |
---|---|
JPS607203B2 (ja) | 1985-02-22 |
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