JPS57104662A - Vapor deposition method - Google Patents

Vapor deposition method

Info

Publication number
JPS57104662A
JPS57104662A JP18020080A JP18020080A JPS57104662A JP S57104662 A JPS57104662 A JP S57104662A JP 18020080 A JP18020080 A JP 18020080A JP 18020080 A JP18020080 A JP 18020080A JP S57104662 A JPS57104662 A JP S57104662A
Authority
JP
Japan
Prior art keywords
boat
vapor deposition
temp
depositing material
drum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP18020080A
Other languages
Japanese (ja)
Inventor
Yoichi Osato
Teruo Misumi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP18020080A priority Critical patent/JPS57104662A/en
Publication of JPS57104662A publication Critical patent/JPS57104662A/en
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/28—Vacuum evaporation by wave energy or particle radiation

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Photoreceptors In Electrophotography (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

PURPOSE:To eliminate the influence of the heat of a heater radiated to the outside of a boat by disposing a metal made shade of high reflectivity against visible light or IR light on the outer side of the vapor deposition boat, and heating the vapor depositing material in the boat. CONSTITUTION:A shade 2 made by bending a metallic plate (e.g.; stainless steel plate) is disposed on the outer side of a vapor deposition boat 1 made of quartz glass. Here, 3 is a support base of the boat 1, and 4 is a W coil heater for heating of the vapor depositing material. Next, the vapor depositing material (e.g.; shot-like Se) is charged in the boat 1, and an Al drum is installed in the position apart by a prescribed distance in a perpendicular direction from the opening of the boat 1, and while this is rotated, the vapor deposition is accomplished. As a result, the temp. elevation of the drum is slight as compared to the case in which the shade 2 is not disposed, thus the drum is maintained at a desired temp. Namely, the leakage of heat to the outside of the boat 1 is considerably decreased and therefore the temp. rise of the substrate forming vapor deposition films in particular is prevented, and the leakage of heat to the outside of the boat 1 is decreased, hence, the vapor depositing material is heated with good efficiency at high temp. elevation rates.
JP18020080A 1980-12-18 1980-12-18 Vapor deposition method Pending JPS57104662A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18020080A JPS57104662A (en) 1980-12-18 1980-12-18 Vapor deposition method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18020080A JPS57104662A (en) 1980-12-18 1980-12-18 Vapor deposition method

Publications (1)

Publication Number Publication Date
JPS57104662A true JPS57104662A (en) 1982-06-29

Family

ID=16079141

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18020080A Pending JPS57104662A (en) 1980-12-18 1980-12-18 Vapor deposition method

Country Status (1)

Country Link
JP (1) JPS57104662A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108359934A (en) * 2018-03-26 2018-08-03 吉林大学 Upper flange plate for the coating machine of uniform evaporation material on column type substrate

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108359934A (en) * 2018-03-26 2018-08-03 吉林大学 Upper flange plate for the coating machine of uniform evaporation material on column type substrate

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