JPS57101670A - Etching apparatus - Google Patents
Etching apparatusInfo
- Publication number
- JPS57101670A JPS57101670A JP17849380A JP17849380A JPS57101670A JP S57101670 A JPS57101670 A JP S57101670A JP 17849380 A JP17849380 A JP 17849380A JP 17849380 A JP17849380 A JP 17849380A JP S57101670 A JPS57101670 A JP S57101670A
- Authority
- JP
- Japan
- Prior art keywords
- etching
- etching liquid
- mask
- sump tank
- stand
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- ing And Chemical Polishing (AREA)
- Weting (AREA)
Abstract
PURPOSE: To enable to obtain a mask with high accuracy by providing a jig holding a hard mask and a channel naturally dropping an etching liquid to a part of a recirculation channel of the etching liquid.
CONSTITUTION: An etching apparatus comprises an etching stand 2 naturally dropping an etching liquid, a lower sump tank 4 accumulating the etching liquid provided to a lower part thereof, an upper sump 5 holding the etching liquid provided to an upper part thereof and a pump 6. To the etching stand 2, a mask 1 to be etched is fixed by a mask holding jig 3 so as to face a surface thereof upwardly. The etching liquid is flowed down onto the mask 1 from the upper sump tank 5 to carry out etching and the etching liquid flowed down into the lower sump tank 4 is returned to the upper sump tank 5 by the pump 6. Thereby, uniform etching is carried out. Further, an inclination angle of the etching stand 2 is pref. about 40W50°.
COPYRIGHT: (C)1982,JPO&Japio
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17849380A JPS57101670A (en) | 1980-12-17 | 1980-12-17 | Etching apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17849380A JPS57101670A (en) | 1980-12-17 | 1980-12-17 | Etching apparatus |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS57101670A true JPS57101670A (en) | 1982-06-24 |
Family
ID=16049409
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17849380A Pending JPS57101670A (en) | 1980-12-17 | 1980-12-17 | Etching apparatus |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS57101670A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007099029A (en) * | 2005-10-03 | 2007-04-19 | Nissan Motor Co Ltd | Unit mounting structure |
-
1980
- 1980-12-17 JP JP17849380A patent/JPS57101670A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007099029A (en) * | 2005-10-03 | 2007-04-19 | Nissan Motor Co Ltd | Unit mounting structure |
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