JPS5694626A - Data-processing method in electron-beam exposure system - Google Patents

Data-processing method in electron-beam exposure system

Info

Publication number
JPS5694626A
JPS5694626A JP16918579A JP16918579A JPS5694626A JP S5694626 A JPS5694626 A JP S5694626A JP 16918579 A JP16918579 A JP 16918579A JP 16918579 A JP16918579 A JP 16918579A JP S5694626 A JPS5694626 A JP S5694626A
Authority
JP
Japan
Prior art keywords
informations
information
bits
central processing
processing device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP16918579A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6239535B2 (enrdf_load_stackoverflow
Inventor
Takeari Uema
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP16918579A priority Critical patent/JPS5694626A/ja
Publication of JPS5694626A publication Critical patent/JPS5694626A/ja
Publication of JPS6239535B2 publication Critical patent/JPS6239535B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electron Beam Exposure (AREA)
JP16918579A 1979-12-27 1979-12-27 Data-processing method in electron-beam exposure system Granted JPS5694626A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16918579A JPS5694626A (en) 1979-12-27 1979-12-27 Data-processing method in electron-beam exposure system

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16918579A JPS5694626A (en) 1979-12-27 1979-12-27 Data-processing method in electron-beam exposure system

Publications (2)

Publication Number Publication Date
JPS5694626A true JPS5694626A (en) 1981-07-31
JPS6239535B2 JPS6239535B2 (enrdf_load_stackoverflow) 1987-08-24

Family

ID=15881805

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16918579A Granted JPS5694626A (en) 1979-12-27 1979-12-27 Data-processing method in electron-beam exposure system

Country Status (1)

Country Link
JP (1) JPS5694626A (enrdf_load_stackoverflow)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5386531A (en) * 1977-01-10 1978-07-31 Nec Corp Display unit of cathode-ray tube

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5386531A (en) * 1977-01-10 1978-07-31 Nec Corp Display unit of cathode-ray tube

Also Published As

Publication number Publication date
JPS6239535B2 (enrdf_load_stackoverflow) 1987-08-24

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