JPS5694301A - Multilayered antireflection film - Google Patents

Multilayered antireflection film

Info

Publication number
JPS5694301A
JPS5694301A JP17100279A JP17100279A JPS5694301A JP S5694301 A JPS5694301 A JP S5694301A JP 17100279 A JP17100279 A JP 17100279A JP 17100279 A JP17100279 A JP 17100279A JP S5694301 A JPS5694301 A JP S5694301A
Authority
JP
Japan
Prior art keywords
films
band
film thickness
central wavelength
minimum reflectance
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP17100279A
Other languages
Japanese (ja)
Other versions
JPH0419521B2 (en
Inventor
Minoru Kiyono
Hiroki Nakajima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP17100279A priority Critical patent/JPS5694301A/en
Publication of JPS5694301A publication Critical patent/JPS5694301A/en
Publication of JPH0419521B2 publication Critical patent/JPH0419521B2/ja
Granted legal-status Critical Current

Links

Abstract

PURPOSE: To obtain the band of a minimum reflectance by forming films of at least three layers on a substrate, making the refractive index of the intermediate film higher than that of the other films, and providing predetermined relations with respect to the central wavelength of the target band to the thicknesses of the respective films.
CONSTITUTION: Antireflection films of 4 layers, films 1W4, are formed on a substrate 5, and the refractive indexes of these films are defined as n1Wn4, and optical film thicknesses as d1Wd4. The term "optical film thickness" refers to physical film thickness x refractive index. Making a film nonreflecting necessitates satisfying the conditions of the formula I or formula II. Now, if the temporal center wavelength of a desired band is defined as λ0', the central wavelength as λ0, b=λ00' and (a) as the value at the optical film thickness (1-a)λ0'/2 of the 2nd layer in which the central wavelength λ0 assumes a minimum reflectance, these are so arranged as to have the relations of the formulas III, IV, whereby the band of a minimum reflectance is obtained. Since this is accomplished by controlling the film thicknesses, the degree of freedom in the selection of materials is increased and the films of high hardness are obtained depending upon applications.
COPYRIGHT: (C)1981,JPO&Japio
JP17100279A 1979-12-28 1979-12-28 Multilayered antireflection film Granted JPS5694301A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17100279A JPS5694301A (en) 1979-12-28 1979-12-28 Multilayered antireflection film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17100279A JPS5694301A (en) 1979-12-28 1979-12-28 Multilayered antireflection film

Publications (2)

Publication Number Publication Date
JPS5694301A true JPS5694301A (en) 1981-07-30
JPH0419521B2 JPH0419521B2 (en) 1992-03-30

Family

ID=15915279

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17100279A Granted JPS5694301A (en) 1979-12-28 1979-12-28 Multilayered antireflection film

Country Status (1)

Country Link
JP (1) JPS5694301A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01131501A (en) * 1987-11-17 1989-05-24 Topcon Corp Wide-band antireflection film
JPH0675103A (en) * 1992-08-28 1994-03-18 Hoya Corp Optical member having antireflection film
JP2005191219A (en) * 2003-12-25 2005-07-14 Sanken Electric Co Ltd Semiconductor light emitting element and its manufacturing method

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5222245A (en) * 1975-08-14 1977-02-19 Ichikoh Ind Ltd Rear-view mirror for car

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5222245A (en) * 1975-08-14 1977-02-19 Ichikoh Ind Ltd Rear-view mirror for car

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01131501A (en) * 1987-11-17 1989-05-24 Topcon Corp Wide-band antireflection film
JPH0675103A (en) * 1992-08-28 1994-03-18 Hoya Corp Optical member having antireflection film
JP2005191219A (en) * 2003-12-25 2005-07-14 Sanken Electric Co Ltd Semiconductor light emitting element and its manufacturing method

Also Published As

Publication number Publication date
JPH0419521B2 (en) 1992-03-30

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