JPS5692405A - Method and device for displacement measurement - Google Patents

Method and device for displacement measurement

Info

Publication number
JPS5692405A
JPS5692405A JP16990979A JP16990979A JPS5692405A JP S5692405 A JPS5692405 A JP S5692405A JP 16990979 A JP16990979 A JP 16990979A JP 16990979 A JP16990979 A JP 16990979A JP S5692405 A JPS5692405 A JP S5692405A
Authority
JP
Japan
Prior art keywords
displacement
measurement
signal
controller
operated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP16990979A
Other languages
Japanese (ja)
Other versions
JPS6117282B2 (en
Inventor
Kenichi Nakasu
Tokio Fujii
Tatsu Kamiyama
Yoshio Watanabe
Takaaki Sato
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
IHI Corp
Saginomiya Seisakusho Inc
Original Assignee
IHI Corp
Saginomiya Seisakusho Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by IHI Corp, Saginomiya Seisakusho Inc filed Critical IHI Corp
Priority to JP16990979A priority Critical patent/JPS5692405A/en
Publication of JPS5692405A publication Critical patent/JPS5692405A/en
Publication of JPS6117282B2 publication Critical patent/JPS6117282B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Measuring Arrangements Characterized By The Use Of Fluids (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)

Abstract

PURPOSE: To hold the measurement precision, by constituting the device so that the measurement system is operated only at the measurement time to make it possible to perform the zero point adjustment and the sensitivity adjstment at every measurement.
CONSTITUTION: When displcement measuring device 1 is set to the nonmeasurement mode, servo controller 11b and signal controller 14 are not operated, and pressure change detecting device 10 and pressure measuring device 12 do not generate the output. Under this state, the command signal is supplied from sequence controller 15 to the measuring equipment to perform the zero point adjustment and the sensitivity adjustment. After completion of respective adjustments, measure pressure supply path 11 and signal pressure supply path 9 are operated by sequence controller 15, and device 1 is set to the measurement mode. The displacement between marks of the object to be measured is converted to a detection object mechanical displacement by displacement transfer mechanism 6, and the coincidence between this displacement and the detecting mechanical displacement is checked, thereby inputting the displacement display signal to signal controller 14.
COPYRIGHT: (C)1981,JPO&Japio
JP16990979A 1979-12-26 1979-12-26 Method and device for displacement measurement Granted JPS5692405A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16990979A JPS5692405A (en) 1979-12-26 1979-12-26 Method and device for displacement measurement

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16990979A JPS5692405A (en) 1979-12-26 1979-12-26 Method and device for displacement measurement

Publications (2)

Publication Number Publication Date
JPS5692405A true JPS5692405A (en) 1981-07-27
JPS6117282B2 JPS6117282B2 (en) 1986-05-07

Family

ID=15895207

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16990979A Granted JPS5692405A (en) 1979-12-26 1979-12-26 Method and device for displacement measurement

Country Status (1)

Country Link
JP (1) JPS5692405A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6021918U (en) * 1983-07-22 1985-02-15 株式会社　小金井製作所 pneumatic converter
JPS6147509A (en) * 1984-08-07 1986-03-08 アールシーエー　トムソン　ライセンシング　コーポレイシヨン Method and device for measuring thickness of material applyed to press machine

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6021918U (en) * 1983-07-22 1985-02-15 株式会社　小金井製作所 pneumatic converter
JPS6147509A (en) * 1984-08-07 1986-03-08 アールシーエー　トムソン　ライセンシング　コーポレイシヨン Method and device for measuring thickness of material applyed to press machine
JPH0569167B2 (en) * 1984-08-07 1993-09-30 Rca Thomson Licensing Corp

Also Published As

Publication number Publication date
JPS6117282B2 (en) 1986-05-07

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