JPS5691211A - Beam scanner - Google Patents
Beam scannerInfo
- Publication number
- JPS5691211A JPS5691211A JP16957079A JP16957079A JPS5691211A JP S5691211 A JPS5691211 A JP S5691211A JP 16957079 A JP16957079 A JP 16957079A JP 16957079 A JP16957079 A JP 16957079A JP S5691211 A JPS5691211 A JP S5691211A
- Authority
- JP
- Japan
- Prior art keywords
- mirror
- rotary
- reflection
- information
- mirror surface
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Laser Beam Printer (AREA)
- Mechanical Optical Scanning Systems (AREA)
- Exposure Or Original Feeding In Electrophotography (AREA)
Abstract
PURPOSE:To enable accurate beam scanning to be accomplished by irradiating a beam to a mirror surface separated from the irradiation surface of the information beam of a rotary polyhedral mirror beam scanner, to form and hold the signal showing the inclination of the mirror surface and controlling the incident angle of the information beam by the inclination signal when said mirror surface to be inspected comes to the information beam irradiation position. CONSTITUTION:The laser beam 22 from a laser oscillator 21 is reflected by one reflection surface 28a of a rotary polyhedral mirror 28 via a reflection mirror 23, an acousto-optic transducer 24, reflection mirrors 25, 26, and a beam expander 27, and is imaged onto a drum 1 via a condensing optical system 29. Scanning is accomplished by the rotation of the rotary polyhderal mirror 28. The beam 22 is split by a half mirror 31, is reflected by the reflection surface 28C of the rotary mirror 28 and enters a solid-state sensor 37. The detected signal thereof goes through a digital converter 7, a shift register 40, a control signal transformer 41, a modulating circuit 42 and the acousto-optic modulator 24 and adjusts the incident angle of the information beam when the mirror surface 28C comes to the information beam incident position of the mirror surface 28a.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16957079A JPS5691211A (en) | 1979-12-26 | 1979-12-26 | Beam scanner |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16957079A JPS5691211A (en) | 1979-12-26 | 1979-12-26 | Beam scanner |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5691211A true JPS5691211A (en) | 1981-07-24 |
Family
ID=15888914
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP16957079A Pending JPS5691211A (en) | 1979-12-26 | 1979-12-26 | Beam scanner |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5691211A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3624163A1 (en) * | 1985-07-24 | 1987-01-29 | Ateq Corp | Mfg. patterns for integrated circuits |
DE4016251A1 (en) * | 1989-05-19 | 1990-11-22 | Ricoh Kk | IMAGE GENERATION DEVICE |
-
1979
- 1979-12-26 JP JP16957079A patent/JPS5691211A/en active Pending
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3624163A1 (en) * | 1985-07-24 | 1987-01-29 | Ateq Corp | Mfg. patterns for integrated circuits |
DE3624163C2 (en) * | 1985-07-24 | 2001-05-17 | Ateq Corp | Device for generating a pattern on a workpiece having a radiation-sensitive layer |
DE4016251A1 (en) * | 1989-05-19 | 1990-11-22 | Ricoh Kk | IMAGE GENERATION DEVICE |
DE4016251C2 (en) * | 1989-05-19 | 1993-03-18 | Ricoh Co., Ltd., Tokio/Tokyo, Jp |
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