JPS5691211A - Beam scanner - Google Patents

Beam scanner

Info

Publication number
JPS5691211A
JPS5691211A JP16957079A JP16957079A JPS5691211A JP S5691211 A JPS5691211 A JP S5691211A JP 16957079 A JP16957079 A JP 16957079A JP 16957079 A JP16957079 A JP 16957079A JP S5691211 A JPS5691211 A JP S5691211A
Authority
JP
Japan
Prior art keywords
mirror
rotary
reflection
information
mirror surface
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP16957079A
Other languages
Japanese (ja)
Inventor
Kenji Okawara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP16957079A priority Critical patent/JPS5691211A/en
Publication of JPS5691211A publication Critical patent/JPS5691211A/en
Pending legal-status Critical Current

Links

Landscapes

  • Laser Beam Printer (AREA)
  • Mechanical Optical Scanning Systems (AREA)
  • Exposure Or Original Feeding In Electrophotography (AREA)

Abstract

PURPOSE:To enable accurate beam scanning to be accomplished by irradiating a beam to a mirror surface separated from the irradiation surface of the information beam of a rotary polyhedral mirror beam scanner, to form and hold the signal showing the inclination of the mirror surface and controlling the incident angle of the information beam by the inclination signal when said mirror surface to be inspected comes to the information beam irradiation position. CONSTITUTION:The laser beam 22 from a laser oscillator 21 is reflected by one reflection surface 28a of a rotary polyhedral mirror 28 via a reflection mirror 23, an acousto-optic transducer 24, reflection mirrors 25, 26, and a beam expander 27, and is imaged onto a drum 1 via a condensing optical system 29. Scanning is accomplished by the rotation of the rotary polyhderal mirror 28. The beam 22 is split by a half mirror 31, is reflected by the reflection surface 28C of the rotary mirror 28 and enters a solid-state sensor 37. The detected signal thereof goes through a digital converter 7, a shift register 40, a control signal transformer 41, a modulating circuit 42 and the acousto-optic modulator 24 and adjusts the incident angle of the information beam when the mirror surface 28C comes to the information beam incident position of the mirror surface 28a.
JP16957079A 1979-12-26 1979-12-26 Beam scanner Pending JPS5691211A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16957079A JPS5691211A (en) 1979-12-26 1979-12-26 Beam scanner

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16957079A JPS5691211A (en) 1979-12-26 1979-12-26 Beam scanner

Publications (1)

Publication Number Publication Date
JPS5691211A true JPS5691211A (en) 1981-07-24

Family

ID=15888914

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16957079A Pending JPS5691211A (en) 1979-12-26 1979-12-26 Beam scanner

Country Status (1)

Country Link
JP (1) JPS5691211A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3624163A1 (en) * 1985-07-24 1987-01-29 Ateq Corp Mfg. patterns for integrated circuits
DE4016251A1 (en) * 1989-05-19 1990-11-22 Ricoh Kk IMAGE GENERATION DEVICE

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3624163A1 (en) * 1985-07-24 1987-01-29 Ateq Corp Mfg. patterns for integrated circuits
DE3624163C2 (en) * 1985-07-24 2001-05-17 Ateq Corp Device for generating a pattern on a workpiece having a radiation-sensitive layer
DE4016251A1 (en) * 1989-05-19 1990-11-22 Ricoh Kk IMAGE GENERATION DEVICE
DE4016251C2 (en) * 1989-05-19 1993-03-18 Ricoh Co., Ltd., Tokio/Tokyo, Jp

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