JPS5688316A - Apparatus for forming thin layer - Google Patents

Apparatus for forming thin layer

Info

Publication number
JPS5688316A
JPS5688316A JP16667979A JP16667979A JPS5688316A JP S5688316 A JPS5688316 A JP S5688316A JP 16667979 A JP16667979 A JP 16667979A JP 16667979 A JP16667979 A JP 16667979A JP S5688316 A JPS5688316 A JP S5688316A
Authority
JP
Japan
Prior art keywords
bellow
bottom plate
lower electrode
bolts
vacuum chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP16667979A
Other languages
Japanese (ja)
Inventor
Takeshige Ichimura
Fumio Kanamaru
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fuji Electric Co Ltd
Original Assignee
Fuji Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fuji Electric Co Ltd filed Critical Fuji Electric Co Ltd
Priority to JP16667979A priority Critical patent/JPS5688316A/en
Publication of JPS5688316A publication Critical patent/JPS5688316A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/023—Means for mechanically adjusting components not otherwise provided for

Abstract

PURPOSE:To support electrodes precisely and in parallel with a specified distance being maintained by connecting the lower electrode to a vacuum chamber via a bellow so that it is tightly sealed, and providing an adjusting mechanism for parallel degrees and the like at the outside of the vacuum chamber. CONSTITUTION:The upper electrode 3 for glow dischage is fixed to the ceiling of a bell jar 1. The lower electrode 4 is fixed to a bottom plate 2 via the bellow 12, and supported by bolts 11 which are screwed into the screw holes in the bottom plate 2. Therefore, the position or inclination of the plane of the lower electrode 4 can be adjusted by the rotation of the bolts 11. The bellow 12 is made of metal and the lower electrode 4 is grounded by way of the bellow 12, the bolts 11, and the bottom plate 2. The space which is tightly sealed by the bell jar 1, the bottom plate 2, the bellow 12, and the electrode 4 constitute the vacuum chamber. In this constitution, the electrodes can be precisely supported in parallel with a specified distance being maintained.
JP16667979A 1979-12-21 1979-12-21 Apparatus for forming thin layer Pending JPS5688316A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16667979A JPS5688316A (en) 1979-12-21 1979-12-21 Apparatus for forming thin layer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16667979A JPS5688316A (en) 1979-12-21 1979-12-21 Apparatus for forming thin layer

Publications (1)

Publication Number Publication Date
JPS5688316A true JPS5688316A (en) 1981-07-17

Family

ID=15835707

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16667979A Pending JPS5688316A (en) 1979-12-21 1979-12-21 Apparatus for forming thin layer

Country Status (1)

Country Link
JP (1) JPS5688316A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60114577A (en) * 1983-11-26 1985-06-21 Matsushita Electric Ind Co Ltd Chemical treating device
JPS62271418A (en) * 1986-05-20 1987-11-25 Matsushita Electric Ind Co Ltd Manufacture of amorphous silicon semiconductor element

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60114577A (en) * 1983-11-26 1985-06-21 Matsushita Electric Ind Co Ltd Chemical treating device
JPH058271B2 (en) * 1983-11-26 1993-02-01 Matsushita Electric Ind Co Ltd
JPS62271418A (en) * 1986-05-20 1987-11-25 Matsushita Electric Ind Co Ltd Manufacture of amorphous silicon semiconductor element
JPH0556850B2 (en) * 1986-05-20 1993-08-20 Matsushita Electric Ind Co Ltd

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