JPS5686349A - Production of substrate for gas sensor with heater - Google Patents
Production of substrate for gas sensor with heaterInfo
- Publication number
- JPS5686349A JPS5686349A JP16351579A JP16351579A JPS5686349A JP S5686349 A JPS5686349 A JP S5686349A JP 16351579 A JP16351579 A JP 16351579A JP 16351579 A JP16351579 A JP 16351579A JP S5686349 A JPS5686349 A JP S5686349A
- Authority
- JP
- Japan
- Prior art keywords
- layer
- substrate
- heater
- trimming
- heater layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16351579A JPS5686349A (en) | 1979-12-18 | 1979-12-18 | Production of substrate for gas sensor with heater |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16351579A JPS5686349A (en) | 1979-12-18 | 1979-12-18 | Production of substrate for gas sensor with heater |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5686349A true JPS5686349A (en) | 1981-07-14 |
Family
ID=15775323
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP16351579A Pending JPS5686349A (en) | 1979-12-18 | 1979-12-18 | Production of substrate for gas sensor with heater |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5686349A (ja) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6199852A (ja) * | 1984-10-22 | 1986-05-17 | Hitachi Ltd | 空燃比検出器 |
JPS6375548A (ja) * | 1986-09-18 | 1988-04-05 | Toshiba Corp | ガスセンサ |
JPH01109250A (ja) * | 1987-10-22 | 1989-04-26 | Toshiba Corp | ガスセンサ |
-
1979
- 1979-12-18 JP JP16351579A patent/JPS5686349A/ja active Pending
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6199852A (ja) * | 1984-10-22 | 1986-05-17 | Hitachi Ltd | 空燃比検出器 |
JPS6375548A (ja) * | 1986-09-18 | 1988-04-05 | Toshiba Corp | ガスセンサ |
JPH01109250A (ja) * | 1987-10-22 | 1989-04-26 | Toshiba Corp | ガスセンサ |
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