JPS5685834A - External appearance inspecting device for semiconductor substrate - Google Patents

External appearance inspecting device for semiconductor substrate

Info

Publication number
JPS5685834A
JPS5685834A JP16377679A JP16377679A JPS5685834A JP S5685834 A JPS5685834 A JP S5685834A JP 16377679 A JP16377679 A JP 16377679A JP 16377679 A JP16377679 A JP 16377679A JP S5685834 A JPS5685834 A JP S5685834A
Authority
JP
Japan
Prior art keywords
substrate
semiconductor substrate
light rays
parallel
external appearance
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP16377679A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6246981B2 (https=
Inventor
Hidemi Amai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP16377679A priority Critical patent/JPS5685834A/ja
Publication of JPS5685834A publication Critical patent/JPS5685834A/ja
Publication of JPS6246981B2 publication Critical patent/JPS6246981B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P74/00—Testing or measuring during manufacture or treatment of wafers, substrates or devices

Landscapes

  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP16377679A 1979-12-17 1979-12-17 External appearance inspecting device for semiconductor substrate Granted JPS5685834A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16377679A JPS5685834A (en) 1979-12-17 1979-12-17 External appearance inspecting device for semiconductor substrate

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16377679A JPS5685834A (en) 1979-12-17 1979-12-17 External appearance inspecting device for semiconductor substrate

Publications (2)

Publication Number Publication Date
JPS5685834A true JPS5685834A (en) 1981-07-13
JPS6246981B2 JPS6246981B2 (https=) 1987-10-06

Family

ID=15780495

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16377679A Granted JPS5685834A (en) 1979-12-17 1979-12-17 External appearance inspecting device for semiconductor substrate

Country Status (1)

Country Link
JP (1) JPS5685834A (https=)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63204140A (ja) * 1986-10-23 1988-08-23 インスペックス・インコーポレーテッド 粒子検出方法および装置
JP2021046249A (ja) * 2019-09-18 2021-03-25 佛山市拓▲きん▼包装有限公司 製品パッケージ印刷を検査する装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52125451U (https=) * 1976-03-19 1977-09-24
JPS5355983A (en) * 1976-10-31 1978-05-20 Konishiroku Photo Ind Co Ltd Automatic micro defect detector

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52125451U (https=) * 1976-03-19 1977-09-24
JPS5355983A (en) * 1976-10-31 1978-05-20 Konishiroku Photo Ind Co Ltd Automatic micro defect detector

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63204140A (ja) * 1986-10-23 1988-08-23 インスペックス・インコーポレーテッド 粒子検出方法および装置
JP2021046249A (ja) * 2019-09-18 2021-03-25 佛山市拓▲きん▼包装有限公司 製品パッケージ印刷を検査する装置

Also Published As

Publication number Publication date
JPS6246981B2 (https=) 1987-10-06

Similar Documents

Publication Publication Date Title
SE435872B (sv) Forfarande for analysering av celler, av en storlek, som er avsevert storre en en vaglengd av synligt ljus samt anordning for genomforande av forfarandet
NO147007C (no) Fremgangsmaate og anordning for bestemmelse av posisjoner av reflektorer med vifteformede lober
FR2442993B1 (fr) Dispositif permettant differents effets de ressort en differentes parties de sa trajectoire
JPS5433683A (en) Air seal mounting for light emitting element
JPS5437077A (en) Chemical evaporation method and apparatus for same
ATE36765T1 (de) Vorrichtung zum ueberpruefen der echtheit von dokumenten.
JPS5685834A (en) External appearance inspecting device for semiconductor substrate
NL7604553A (nl) Met corpusculaire stralen werkende doorstraal- rastermicroscoop met energie-analysator.
ATA250979A (de) Vorrichtung zum bestrahlen von flaechen mit ultraviolettstrahlung
IT1154977B (it) Dispositivo e procedimento per lo sfruttamento dei raggi solari quale fonte energetica
JPS53145564A (en) Production of semiconductor device
JPS51112183A (en) Diffraction pattern detector
IT8068541A0 (it) Procedimento e dispositivo per la umidificazione del riso bollito
JPS5373692A (en) Laser processing device
JPS57178134A (en) Specular surface defect observing device
JPS5214477A (en) Method to detect a defect in a transparent test object
JPS538061A (en) Automatic positioning apparatus of articles
JPS5382492A (en) Surface inspecting method
JPS524887A (en) Optical surface scar inspector
JPS57130435A (en) Annealing method of matter by light beam
JPS6486816A (en) Lighting equipment for rearing plant
JPS53120552A (en) Evaluation method of plating surface
SE8603951L (sv) Anordning for betraktande av en inom ramen for en neutronradiografi bestralad folie
JPS5378855A (en) Polygonal jewery identifying device
JPS52102741A (en) Heat fixing apparatus