JPS5684472A - Forming method of coating - Google Patents

Forming method of coating

Info

Publication number
JPS5684472A
JPS5684472A JP16001179A JP16001179A JPS5684472A JP S5684472 A JPS5684472 A JP S5684472A JP 16001179 A JP16001179 A JP 16001179A JP 16001179 A JP16001179 A JP 16001179A JP S5684472 A JPS5684472 A JP S5684472A
Authority
JP
Japan
Prior art keywords
coating
mask
substrate
spattering
target
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP16001179A
Other languages
English (en)
Japanese (ja)
Other versions
JPS616150B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
Hisashi Shimada
Tomootsu Ishiguro
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toyota Central R&D Labs Inc
Original Assignee
Toyota Central R&D Labs Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toyota Central R&D Labs Inc filed Critical Toyota Central R&D Labs Inc
Priority to JP16001179A priority Critical patent/JPS5684472A/ja
Publication of JPS5684472A publication Critical patent/JPS5684472A/ja
Publication of JPS616150B2 publication Critical patent/JPS616150B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/02—Pretreatment of the material to be coated

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
JP16001179A 1979-12-10 1979-12-10 Forming method of coating Granted JPS5684472A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16001179A JPS5684472A (en) 1979-12-10 1979-12-10 Forming method of coating

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16001179A JPS5684472A (en) 1979-12-10 1979-12-10 Forming method of coating

Publications (2)

Publication Number Publication Date
JPS5684472A true JPS5684472A (en) 1981-07-09
JPS616150B2 JPS616150B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1986-02-24

Family

ID=15706040

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16001179A Granted JPS5684472A (en) 1979-12-10 1979-12-10 Forming method of coating

Country Status (1)

Country Link
JP (1) JPS5684472A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63201954U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1987-04-20 1988-12-27

Also Published As

Publication number Publication date
JPS616150B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1986-02-24

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