Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Toyota Central R&D Labs Inc
Original Assignee
Toyota Central R&D Labs Inc
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Filing date
Publication date
Application filed by Toyota Central R&D Labs IncfiledCriticalToyota Central R&D Labs Inc
Priority to JP16001179ApriorityCriticalpatent/JPS5684472A/ja
Publication of JPS5684472ApublicationCriticalpatent/JPS5684472A/ja
Publication of JPS616150B2publicationCriticalpatent/JPS616150B2/ja
C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
C23C14/02—Pretreatment of the material to be coated
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Chemical & Material Sciences
(AREA)
Chemical Kinetics & Catalysis
(AREA)
Engineering & Computer Science
(AREA)
Materials Engineering
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Mechanical Engineering
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Metallurgy
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Organic Chemistry
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Physical Vapour Deposition
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JP16001179A1979-12-101979-12-10Forming method of coating
GrantedJPS5684472A
(en)