JPS5682435A - Defect inspecting apparatus - Google Patents

Defect inspecting apparatus

Info

Publication number
JPS5682435A
JPS5682435A JP15957079A JP15957079A JPS5682435A JP S5682435 A JPS5682435 A JP S5682435A JP 15957079 A JP15957079 A JP 15957079A JP 15957079 A JP15957079 A JP 15957079A JP S5682435 A JPS5682435 A JP S5682435A
Authority
JP
Japan
Prior art keywords
image pickup
objects
signals
differential
inspection objects
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15957079A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6216373B2 (enrdf_load_stackoverflow
Inventor
Masahiro Kishi
Yasukazu Sano
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fuji Electric Co Ltd
Original Assignee
Fuji Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fuji Electric Co Ltd filed Critical Fuji Electric Co Ltd
Priority to JP15957079A priority Critical patent/JPS5682435A/ja
Publication of JPS5682435A publication Critical patent/JPS5682435A/ja
Publication of JPS6216373B2 publication Critical patent/JPS6216373B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP15957079A 1979-12-08 1979-12-08 Defect inspecting apparatus Granted JPS5682435A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15957079A JPS5682435A (en) 1979-12-08 1979-12-08 Defect inspecting apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15957079A JPS5682435A (en) 1979-12-08 1979-12-08 Defect inspecting apparatus

Publications (2)

Publication Number Publication Date
JPS5682435A true JPS5682435A (en) 1981-07-06
JPS6216373B2 JPS6216373B2 (enrdf_load_stackoverflow) 1987-04-13

Family

ID=15696603

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15957079A Granted JPS5682435A (en) 1979-12-08 1979-12-08 Defect inspecting apparatus

Country Status (1)

Country Link
JP (1) JPS5682435A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6080744A (ja) * 1983-10-11 1985-05-08 Nok Corp 表面欠陥検査方法
US5000643A (en) * 1985-07-16 1991-03-19 Kao Corporation Goods handling method and apparatus thereof

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5257876A (en) * 1975-11-07 1977-05-12 Fuji Electric Co Ltd Fruit flaw identifying apparatus

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5257876A (en) * 1975-11-07 1977-05-12 Fuji Electric Co Ltd Fruit flaw identifying apparatus

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6080744A (ja) * 1983-10-11 1985-05-08 Nok Corp 表面欠陥検査方法
US5000643A (en) * 1985-07-16 1991-03-19 Kao Corporation Goods handling method and apparatus thereof
US5024572A (en) * 1985-07-16 1991-06-18 Kao Corporation Goods handling method and apparatus thereof

Also Published As

Publication number Publication date
JPS6216373B2 (enrdf_load_stackoverflow) 1987-04-13

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