JPS567998B2 - - Google Patents
Info
- Publication number
- JPS567998B2 JPS567998B2 JP4836973A JP4836973A JPS567998B2 JP S567998 B2 JPS567998 B2 JP S567998B2 JP 4836973 A JP4836973 A JP 4836973A JP 4836973 A JP4836973 A JP 4836973A JP S567998 B2 JPS567998 B2 JP S567998B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
- C30B15/20—Controlling or regulating
- C30B15/22—Stabilisation or shape controlling of the molten zone near the pulled crystal; Controlling the section of the crystal
- C30B15/26—Stabilisation or shape controlling of the molten zone near the pulled crystal; Controlling the section of the crystal using television detectors; using photo or X-ray detectors
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B13/00—Single-crystal growth by zone-melting; Refining by zone-melting
- C30B13/28—Controlling or regulating
- C30B13/30—Stabilisation or shape controlling of the molten zone, e.g. by concentrators, by electromagnetic fields; Controlling the section of the crystal
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/022—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness by means of tv-camera scanning
Landscapes
- Chemical & Material Sciences (AREA)
- Metallurgy (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Physics & Mathematics (AREA)
- Organic Chemistry (AREA)
- Electromagnetism (AREA)
- General Physics & Mathematics (AREA)
- Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
- Measurement Of Levels Of Liquids Or Fluent Solid Materials (AREA)
- Transforming Light Signals Into Electric Signals (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE2220819A DE2220819B2 (de) | 1972-04-27 | 1972-04-27 | Vorrichtung zur Steuerung des Durchmessers eines Halbleiterstabes an der Erstarrungsfront der Schmelzzone beim tiegellosen Zonenschmelzen |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4954278A JPS4954278A (cg-RX-API-DMAC10.html) | 1974-05-27 |
| JPS567998B2 true JPS567998B2 (cg-RX-API-DMAC10.html) | 1981-02-20 |
Family
ID=5843514
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4836973A Expired JPS567998B2 (cg-RX-API-DMAC10.html) | 1972-04-27 | 1973-04-26 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US3816650A (cg-RX-API-DMAC10.html) |
| JP (1) | JPS567998B2 (cg-RX-API-DMAC10.html) |
| BE (1) | BE798824A (cg-RX-API-DMAC10.html) |
| DE (1) | DE2220819B2 (cg-RX-API-DMAC10.html) |
| NL (1) | NL7300238A (cg-RX-API-DMAC10.html) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2516756A1 (de) * | 1975-04-16 | 1976-10-28 | Betr Forsch Inst Angew Forsch | Verfahren und vorrichtung zur bestimmung einer flaechenabmessung in einer ebene |
| DE2846500C2 (de) * | 1977-10-31 | 1984-12-06 | Institut problem upravlenija, Moskau/Moskva | Steuerungsverfahren für eine bewegliche Energiequelle beim Erhitzen der Oberfläche eines Objekts und Einrichtung zur Durchführung dieses Verfahrens |
| JPS60112687A (ja) * | 1983-11-21 | 1985-06-19 | Nichiden Mach Ltd | 単結晶製造方法及び装置 |
-
1972
- 1972-04-27 DE DE2220819A patent/DE2220819B2/de active Granted
-
1973
- 1973-01-08 NL NL7300238A patent/NL7300238A/xx unknown
- 1973-03-09 US US00339724A patent/US3816650A/en not_active Expired - Lifetime
- 1973-04-26 JP JP4836973A patent/JPS567998B2/ja not_active Expired
- 1973-04-27 BE BE130502A patent/BE798824A/xx not_active IP Right Cessation
Also Published As
| Publication number | Publication date |
|---|---|
| BE798824A (fr) | 1973-10-29 |
| DE2220819A1 (de) | 1973-11-08 |
| JPS4954278A (cg-RX-API-DMAC10.html) | 1974-05-27 |
| DE2220819B2 (de) | 1978-09-28 |
| NL7300238A (cg-RX-API-DMAC10.html) | 1973-10-30 |
| DE2220819C3 (cg-RX-API-DMAC10.html) | 1979-05-23 |
| US3816650A (en) | 1974-06-11 |