JPS567428A - Holding mechanism for silicon substrate - Google Patents

Holding mechanism for silicon substrate

Info

Publication number
JPS567428A
JPS567428A JP8358079A JP8358079A JPS567428A JP S567428 A JPS567428 A JP S567428A JP 8358079 A JP8358079 A JP 8358079A JP 8358079 A JP8358079 A JP 8358079A JP S567428 A JPS567428 A JP S567428A
Authority
JP
Japan
Prior art keywords
substrate
platen
slider
holding mechanism
carrying
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8358079A
Other languages
English (en)
Japanese (ja)
Other versions
JPS626301B2 (enExample
Inventor
Toshio Matsuyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Kyushu Ltd
Original Assignee
NEC Kyushu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Kyushu Ltd filed Critical NEC Kyushu Ltd
Priority to JP8358079A priority Critical patent/JPS567428A/ja
Publication of JPS567428A publication Critical patent/JPS567428A/ja
Publication of JPS626301B2 publication Critical patent/JPS626301B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/26—Bombardment with radiation
    • H01L21/263—Bombardment with radiation with high-energy radiation
    • H01L21/265—Bombardment with radiation with high-energy radiation producing ion implantation

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • High Energy & Nuclear Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Toxicology (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Health & Medical Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Feeding Of Articles By Means Other Than Belts Or Rollers (AREA)
  • Discharge By Other Means (AREA)
JP8358079A 1979-07-02 1979-07-02 Holding mechanism for silicon substrate Granted JPS567428A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8358079A JPS567428A (en) 1979-07-02 1979-07-02 Holding mechanism for silicon substrate

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8358079A JPS567428A (en) 1979-07-02 1979-07-02 Holding mechanism for silicon substrate

Publications (2)

Publication Number Publication Date
JPS567428A true JPS567428A (en) 1981-01-26
JPS626301B2 JPS626301B2 (enExample) 1987-02-10

Family

ID=13806426

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8358079A Granted JPS567428A (en) 1979-07-02 1979-07-02 Holding mechanism for silicon substrate

Country Status (1)

Country Link
JP (1) JPS567428A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60133628U (ja) * 1984-02-14 1985-09-06 関西日本電気株式会社 イオン注入装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60133628U (ja) * 1984-02-14 1985-09-06 関西日本電気株式会社 イオン注入装置

Also Published As

Publication number Publication date
JPS626301B2 (enExample) 1987-02-10

Similar Documents

Publication Publication Date Title
JPS53125025A (en) Document transport method for automatic document feed device of copier
JPS567428A (en) Holding mechanism for silicon substrate
JPS5588086A (en) Transfer device
JPS565575A (en) Guide device of transfer member
JPS56145008A (en) Wire clamp mechanism of pallet for free cycle conveyor
JPS5474738A (en) Automatic feeder of originals in copying machine
JPS5516440A (en) Storing jig for semiconductor device
JPS56101755A (en) Device for feeding semiconductor element piece by piece
ES8302443A1 (es) "perfeccionamientos en los aparatos para producir cierres de cremallera".
JPS55551A (en) Pressure contact force adjusting device of cleaning blade of cleaning device in copying machine and other
JPS5719215A (en) Aligning and transport device
JPS5793804A (en) Roller conveyer
FR2428593A3 (fr) Dispositif a nettoyer les elements porteurs de charges ou les guides de convoyeurs continus
JPS5216175A (en) Wafer spotting device
JPS5263679A (en) Sample moving device
JPS5336479A (en) Packaging device for magnetic bar material
JPS5731029A (en) Multi-item input device
JPS5619761A (en) Sheet clamping device
JPS5678721A (en) Horizontal turning type transferring device
JPS5281863A (en) Article conveying device
JPS6443441A (en) Sheet feeder
JPS532876A (en) Piler
JPS57119369A (en) Mechanism for stopping original of automatic feeder for copying original
JPS5472030A (en) Cleaning face automatic changeover type tape cleaner
JPS5248773A (en) Braking device