JPS5672464U - - Google Patents

Info

Publication number
JPS5672464U
JPS5672464U JP15495179U JP15495179U JPS5672464U JP S5672464 U JPS5672464 U JP S5672464U JP 15495179 U JP15495179 U JP 15495179U JP 15495179 U JP15495179 U JP 15495179U JP S5672464 U JPS5672464 U JP S5672464U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15495179U
Other languages
Japanese (ja)
Other versions
JPS594442Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP15495179U priority Critical patent/JPS594442Y2/ja
Publication of JPS5672464U publication Critical patent/JPS5672464U/ja
Application granted granted Critical
Publication of JPS594442Y2 publication Critical patent/JPS594442Y2/ja
Expired legal-status Critical Current

Links

JP15495179U 1979-11-08 1979-11-08 走査電子顕微鏡 Expired JPS594442Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15495179U JPS594442Y2 (ja) 1979-11-08 1979-11-08 走査電子顕微鏡

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15495179U JPS594442Y2 (ja) 1979-11-08 1979-11-08 走査電子顕微鏡

Publications (2)

Publication Number Publication Date
JPS5672464U true JPS5672464U (enrdf_load_stackoverflow) 1981-06-15
JPS594442Y2 JPS594442Y2 (ja) 1984-02-08

Family

ID=29385452

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15495179U Expired JPS594442Y2 (ja) 1979-11-08 1979-11-08 走査電子顕微鏡

Country Status (1)

Country Link
JP (1) JPS594442Y2 (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58193453U (ja) * 1982-06-14 1983-12-22 株式会社明石製作所 電子線装置における反射電子検出装置
WO2016088249A1 (ja) * 2014-12-05 2016-06-09 株式会社日立ハイテクノロジーズ 荷電粒子線装置及び荷電粒子線装置による観察方法

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6406032B2 (ja) * 2015-01-27 2018-10-17 新日鐵住金株式会社 試料台およびそれを備えた電子顕微鏡
JP6790559B2 (ja) * 2016-08-02 2020-11-25 日本製鉄株式会社 試料台およびそれを備えた電子顕微鏡

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58193453U (ja) * 1982-06-14 1983-12-22 株式会社明石製作所 電子線装置における反射電子検出装置
WO2016088249A1 (ja) * 2014-12-05 2016-06-09 株式会社日立ハイテクノロジーズ 荷電粒子線装置及び荷電粒子線装置による観察方法
JPWO2016088249A1 (ja) * 2014-12-05 2017-09-21 株式会社日立ハイテクノロジーズ 荷電粒子線装置及び荷電粒子線装置による観察方法

Also Published As

Publication number Publication date
JPS594442Y2 (ja) 1984-02-08

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