JPS5670869A - Spinner coating apparatus - Google Patents

Spinner coating apparatus

Info

Publication number
JPS5670869A
JPS5670869A JP14656579A JP14656579A JPS5670869A JP S5670869 A JPS5670869 A JP S5670869A JP 14656579 A JP14656579 A JP 14656579A JP 14656579 A JP14656579 A JP 14656579A JP S5670869 A JPS5670869 A JP S5670869A
Authority
JP
Japan
Prior art keywords
temp
adsorption head
signal
resistance wire
circuit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14656579A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6222661B2 (enExample
Inventor
Tsutomu Hanno
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP14656579A priority Critical patent/JPS5670869A/ja
Publication of JPS5670869A publication Critical patent/JPS5670869A/ja
Publication of JPS6222661B2 publication Critical patent/JPS6222661B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Coating Apparatus (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP14656579A 1979-11-14 1979-11-14 Spinner coating apparatus Granted JPS5670869A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14656579A JPS5670869A (en) 1979-11-14 1979-11-14 Spinner coating apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14656579A JPS5670869A (en) 1979-11-14 1979-11-14 Spinner coating apparatus

Publications (2)

Publication Number Publication Date
JPS5670869A true JPS5670869A (en) 1981-06-13
JPS6222661B2 JPS6222661B2 (enExample) 1987-05-19

Family

ID=15410543

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14656579A Granted JPS5670869A (en) 1979-11-14 1979-11-14 Spinner coating apparatus

Country Status (1)

Country Link
JP (1) JPS5670869A (enExample)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63111979U (enExample) * 1987-01-14 1988-07-19
JPH0286826A (ja) * 1989-07-07 1990-03-27 Hitachi Ltd 被加工物の処理方法
JPH04363169A (ja) * 1991-05-08 1992-12-16 Hitachi Ltd フォトレジストの塗布方法
JPH0824621A (ja) * 1995-07-17 1996-01-30 Hitachi Ltd 処理液の滴下方法

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63111979U (enExample) * 1987-01-14 1988-07-19
JPH0286826A (ja) * 1989-07-07 1990-03-27 Hitachi Ltd 被加工物の処理方法
JPH04363169A (ja) * 1991-05-08 1992-12-16 Hitachi Ltd フォトレジストの塗布方法
JPH0824621A (ja) * 1995-07-17 1996-01-30 Hitachi Ltd 処理液の滴下方法

Also Published As

Publication number Publication date
JPS6222661B2 (enExample) 1987-05-19

Similar Documents

Publication Publication Date Title
JPS5610244A (en) Temperature sensor controlling device
SE7707626L (sv) Forfarande och anordning for tillverkning av en emaljerad elektrisk ledare
JPS5670869A (en) Spinner coating apparatus
GR65200B (en) Controller of temperature for electric heating apparatus especially for electric roasting hearths
JPS53131081A (en) Thermometer
JPS6426136A (en) Heat quantity measuring instrument
JPS5226641A (en) Heating elements
JPS54109188A (en) Method of fabricating self-fusing flat type insulated wire
JPS5344944A (en) Electric resistive heater and method of producing same
JPS55134325A (en) Temperature sensor
JPS5527208A (en) Heat sensitive recording apparatus
JPS5544931A (en) Temperature characteristics tester
JPS5399984A (en) Viscosity measuring apparatus of cleamy materials
JPS5279339A (en) Temperature control method of electric furnace
JPS5684542A (en) Electric heater
JPS51124966A (en) Method and apparatus of wind velocity measurement
Anisimov Unit for Regulating Annealing Degree of Wire During Its Rewinding
JPS5723733A (en) Temperature control device for carpet type electric heater
FR2369805A1 (fr) Chauffage pour motocycliste
JPS5258139A (en) Method of producing heater using positive characteristic thermistor
JPS5670642A (en) Semiconductor device
JPS63168986U (enExample)
JPS54124968A (en) Manufacture of semiconductor element
JPS51115540A (en) Bonding method
JPS51118120A (en) Heating method of pipe and its apparatus