JPS5669503A - Coated film thickness measuring method and apparatus - Google Patents
Coated film thickness measuring method and apparatusInfo
- Publication number
- JPS5669503A JPS5669503A JP14634379A JP14634379A JPS5669503A JP S5669503 A JPS5669503 A JP S5669503A JP 14634379 A JP14634379 A JP 14634379A JP 14634379 A JP14634379 A JP 14634379A JP S5669503 A JPS5669503 A JP S5669503A
- Authority
- JP
- Japan
- Prior art keywords
- reference voltage
- humidity
- amendment
- value
- film thickness
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
PURPOSE: To remove the measurment error due to humidity by amending the measured value by the humidity value of the atmosphere of substance to be measured.
CONSTITUTION: In the vicinity of the substrate to be measured 10, a humidity detector 26 is disposed and a relative humidity is detected electrically. A detected humidity signal is fed to an amendment value output circuit 28, a coated film thickness signal of output of voltmeter 24 and a detected humidity signal are operated and an amendment value according to the relative humidity and the coated film thickness is output. The amendment value of the amendment value output circuit 28 is transmitted to an amendment circuit 34 including a multiplier 30 and an adder 32 to thereby amend the reference voltage of a reference voltage setting device 22. Namely, the reference voltage of the reference voltage setting device 22 is multiplied by the amendment value in the multiplier 30, the result is added in the reference voltage and the adder 32 and it is transmitted to a divider 20 as a reference voltage Vs.
COPYRIGHT: (C)1981,JPO&Japio
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14634379A JPS5669503A (en) | 1979-11-12 | 1979-11-12 | Coated film thickness measuring method and apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14634379A JPS5669503A (en) | 1979-11-12 | 1979-11-12 | Coated film thickness measuring method and apparatus |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5669503A true JPS5669503A (en) | 1981-06-10 |
| JPS6116003B2 JPS6116003B2 (en) | 1986-04-26 |
Family
ID=15405547
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14634379A Granted JPS5669503A (en) | 1979-11-12 | 1979-11-12 | Coated film thickness measuring method and apparatus |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5669503A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2013006575A1 (en) * | 2011-07-04 | 2013-01-10 | Kla-Tencor Corporation | Atmospheric molecular contamination control with local purging |
| JP2016161541A (en) * | 2015-03-05 | 2016-09-05 | いすゞ自動車株式会社 | Sensor |
-
1979
- 1979-11-12 JP JP14634379A patent/JPS5669503A/en active Granted
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2013006575A1 (en) * | 2011-07-04 | 2013-01-10 | Kla-Tencor Corporation | Atmospheric molecular contamination control with local purging |
| CN103765157A (en) * | 2011-07-04 | 2014-04-30 | 科磊股份有限公司 | Atmospheric molecular contamination control with local purging |
| US8830486B2 (en) | 2011-07-04 | 2014-09-09 | Kla-Tencor Corporation | Atmospheric molecular contamination control with local purging |
| US9110020B2 (en) | 2011-07-04 | 2015-08-18 | Kla-Tencor Corporation | Atmospheric molecular contamination control with local purging |
| JP2016161541A (en) * | 2015-03-05 | 2016-09-05 | いすゞ自動車株式会社 | Sensor |
| WO2016140214A1 (en) * | 2015-03-05 | 2016-09-09 | いすゞ自動車株式会社 | Sensor |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6116003B2 (en) | 1986-04-26 |
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