JPS566694B2 - - Google Patents

Info

Publication number
JPS566694B2
JPS566694B2 JP15981475A JP15981475A JPS566694B2 JP S566694 B2 JPS566694 B2 JP S566694B2 JP 15981475 A JP15981475 A JP 15981475A JP 15981475 A JP15981475 A JP 15981475A JP S566694 B2 JPS566694 B2 JP S566694B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP15981475A
Other languages
Japanese (ja)
Other versions
JPS51125858A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPS51125858A publication Critical patent/JPS51125858A/ja
Publication of JPS566694B2 publication Critical patent/JPS566694B2/ja
Granted legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01GCAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G5/00Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture
    • H01G5/16Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture using variation of distance between electrodes

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
JP50159814A 1975-01-07 1975-12-26 Pressure sensitiue capacitor Granted JPS51125858A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US05/539,212 US3993939A (en) 1975-01-07 1975-01-07 Pressure variable capacitor

Publications (2)

Publication Number Publication Date
JPS51125858A JPS51125858A (en) 1976-11-02
JPS566694B2 true JPS566694B2 (US08063081-20111122-C00044.png) 1981-02-13

Family

ID=24150288

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50159814A Granted JPS51125858A (en) 1975-01-07 1975-12-26 Pressure sensitiue capacitor

Country Status (6)

Country Link
US (1) US3993939A (US08063081-20111122-C00044.png)
JP (1) JPS51125858A (US08063081-20111122-C00044.png)
CA (1) CA1037575A (US08063081-20111122-C00044.png)
DE (1) DE2556947C3 (US08063081-20111122-C00044.png)
FR (1) FR2297485A1 (US08063081-20111122-C00044.png)
GB (1) GB1517705A (US08063081-20111122-C00044.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09104374A (ja) * 1995-10-09 1997-04-22 Mitsukazu Kaizaki クローラ用舗装路面損傷防止器

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US7624755B2 (en) * 2005-12-09 2009-12-01 Honeywell International Inc. Gas valve with overtravel
JP2007273932A (ja) * 2006-03-06 2007-10-18 Fujitsu Ltd 可変キャパシタおよび可変キャパシタ製造方法
US7523762B2 (en) * 2006-03-22 2009-04-28 Honeywell International Inc. Modulating gas valves and systems
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US20080099082A1 (en) * 2006-10-27 2008-05-01 Honeywell International Inc. Gas valve shutoff seal
US7644731B2 (en) * 2006-11-30 2010-01-12 Honeywell International Inc. Gas valve with resilient seat
EP2400893B1 (en) 2009-02-27 2017-01-04 Koninklijke Philips N.V. Pre-collapsed cmut with mechanical collapse retention
US8525816B2 (en) 2010-02-10 2013-09-03 Wacom Co., Ltd. Position pointer, variable capacitor and inputting apparatus
JP5534419B2 (ja) * 2010-03-09 2014-07-02 株式会社ワコム 位置指示器、可変容量コンデンサ及び入力装置
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US9016133B2 (en) * 2011-01-05 2015-04-28 Nxp, B.V. Pressure sensor with pressure-actuated switch
US20120228109A1 (en) * 2011-03-08 2012-09-13 Ibiden Co., Ltd. Sensor, keyboard and method for manufacturing sensor
US8404132B2 (en) * 2011-03-31 2013-03-26 Fujifilm Corporation Forming a membrane having curved features
US8839815B2 (en) 2011-12-15 2014-09-23 Honeywell International Inc. Gas valve with electronic cycle counter
US9995486B2 (en) 2011-12-15 2018-06-12 Honeywell International Inc. Gas valve with high/low gas pressure detection
US9074770B2 (en) 2011-12-15 2015-07-07 Honeywell International Inc. Gas valve with electronic valve proving system
US9557059B2 (en) 2011-12-15 2017-01-31 Honeywell International Inc Gas valve with communication link
US8905063B2 (en) 2011-12-15 2014-12-09 Honeywell International Inc. Gas valve with fuel rate monitor
US9835265B2 (en) 2011-12-15 2017-12-05 Honeywell International Inc. Valve with actuator diagnostics
US9851103B2 (en) 2011-12-15 2017-12-26 Honeywell International Inc. Gas valve with overpressure diagnostics
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US9234661B2 (en) 2012-09-15 2016-01-12 Honeywell International Inc. Burner control system
US10422531B2 (en) 2012-09-15 2019-09-24 Honeywell International Inc. System and approach for controlling a combustion chamber
US9249008B2 (en) 2012-12-20 2016-02-02 Industrial Technology Research Institute MEMS device with multiple electrodes and fabricating method thereof
EP2868970B1 (en) 2013-10-29 2020-04-22 Honeywell Technologies Sarl Regulating device
ITTO20130931A1 (it) * 2013-11-15 2015-05-16 St Microelectronics Srl Sensore di forza microelettromeccanico di tipo capacitivo e relativo metodo di rilevamento di forza
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US9841122B2 (en) 2014-09-09 2017-12-12 Honeywell International Inc. Gas valve with electronic valve proving system
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Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3422324A (en) * 1967-05-17 1969-01-14 Webb James E Pressure variable capacitor

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Patent Citations (1)

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Publication number Priority date Publication date Assignee Title
US3422324A (en) * 1967-05-17 1969-01-14 Webb James E Pressure variable capacitor

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09104374A (ja) * 1995-10-09 1997-04-22 Mitsukazu Kaizaki クローラ用舗装路面損傷防止器

Also Published As

Publication number Publication date
GB1517705A (en) 1978-07-12
DE2556947C3 (de) 1979-09-13
DE2556947B2 (de) 1979-01-11
JPS51125858A (en) 1976-11-02
DE2556947A1 (de) 1976-07-08
CA1037575A (en) 1978-08-29
FR2297485A1 (fr) 1976-08-06
US3993939A (en) 1976-11-23
FR2297485B1 (US08063081-20111122-C00044.png) 1980-03-07

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