JPS5660017A - Control device for sample transference - Google Patents

Control device for sample transference

Info

Publication number
JPS5660017A
JPS5660017A JP13342079A JP13342079A JPS5660017A JP S5660017 A JPS5660017 A JP S5660017A JP 13342079 A JP13342079 A JP 13342079A JP 13342079 A JP13342079 A JP 13342079A JP S5660017 A JPS5660017 A JP S5660017A
Authority
JP
Japan
Prior art keywords
sample
speed
transferring
condition
motor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13342079A
Other languages
Japanese (ja)
Other versions
JPS59127B2 (en
Inventor
Tomeo Suzuki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK filed Critical Jeol Ltd
Priority to JP54133420A priority Critical patent/JPS59127B2/en
Publication of JPS5660017A publication Critical patent/JPS5660017A/en
Publication of JPS59127B2 publication Critical patent/JPS59127B2/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
    • H01J37/3411—Constructional aspects of the reactor
    • H01J37/3435—Target holders (includes backing plates and endblocks)

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Beam Exposure (AREA)
  • Control Of Position Or Direction (AREA)
  • Control Of Stepping Motors (AREA)

Abstract

PURPOSE:To make a sample to be transferred quickly when a sample-holding stage is made to be transferred by a pulse motor by a method wherein when the transferring speed become lower than a set point, the pulse motor is made to restart from a low speed or from the stop condition. CONSTITUTION:When a sample 2 is to be exposed to an electron beam, etc., by transferring a sample-holding stage 1 by a pulse motor 3, the transferring speed of the stage 1 is measured with a length measuring device 5 of a laser interference meter, a downcounter 6, etc. The output ie inputted to a pulse-interval discriminating circuit 10 consisting of a retrigger one-shot circuit 11, an and-gate 12, one- shot circuits 13, 14. When the speed becomes lower than the value being set up in a register 7, the output of the circuit 10 is inputted to a speed controlling circuit 18 to make the pulse motor 3 once to be in a decelerated condition, and the motor is made to restart from the stop condition or from a low speed condition. By this way, quick transferring of the sample can be attained even while the motor is operating in an abnormal condition.
JP54133420A 1979-10-16 1979-10-16 Sample movement control device Expired JPS59127B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP54133420A JPS59127B2 (en) 1979-10-16 1979-10-16 Sample movement control device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP54133420A JPS59127B2 (en) 1979-10-16 1979-10-16 Sample movement control device

Publications (2)

Publication Number Publication Date
JPS5660017A true JPS5660017A (en) 1981-05-23
JPS59127B2 JPS59127B2 (en) 1984-01-05

Family

ID=15104348

Family Applications (1)

Application Number Title Priority Date Filing Date
JP54133420A Expired JPS59127B2 (en) 1979-10-16 1979-10-16 Sample movement control device

Country Status (1)

Country Link
JP (1) JPS59127B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USRE38798E1 (en) 1992-10-22 2005-09-20 Nikon Corporation Projection exposure apparatus

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6131438U (en) * 1984-07-30 1986-02-25 株式会社 プロポ−シヨン・ユニ−システム sweating device
JPS61171947U (en) * 1985-04-15 1986-10-25
JPH01135938U (en) * 1988-03-11 1989-09-18

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52147715A (en) * 1976-06-04 1977-12-08 Oki Electric Ind Co Ltd Drive system in stepping motors

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52147715A (en) * 1976-06-04 1977-12-08 Oki Electric Ind Co Ltd Drive system in stepping motors

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USRE38798E1 (en) 1992-10-22 2005-09-20 Nikon Corporation Projection exposure apparatus
USRE39083E1 (en) 1992-10-22 2006-05-02 Nikon Corporation Projection exposure apparatus

Also Published As

Publication number Publication date
JPS59127B2 (en) 1984-01-05

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