JPS5659064A - Double seal type valve of intermediate exhaustion - Google Patents

Double seal type valve of intermediate exhaustion

Info

Publication number
JPS5659064A
JPS5659064A JP13266679A JP13266679A JPS5659064A JP S5659064 A JPS5659064 A JP S5659064A JP 13266679 A JP13266679 A JP 13266679A JP 13266679 A JP13266679 A JP 13266679A JP S5659064 A JPS5659064 A JP S5659064A
Authority
JP
Japan
Prior art keywords
exhaustion
valve
space
elastomer
vessel wall
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13266679A
Other languages
English (en)
Other versions
JPS5917302B2 (ja
Inventor
Hajime Ishimaru
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
KOUENERUGII BUTSURIGAKU KENKYUSHO
Original Assignee
KOUENERUGII BUTSURIGAKU KENKYUSHO
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by KOUENERUGII BUTSURIGAKU KENKYUSHO filed Critical KOUENERUGII BUTSURIGAKU KENKYUSHO
Priority to JP54132666A priority Critical patent/JPS5917302B2/ja
Publication of JPS5659064A publication Critical patent/JPS5659064A/ja
Publication of JPS5917302B2 publication Critical patent/JPS5917302B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Lift Valve (AREA)
  • Details Of Valves (AREA)
JP54132666A 1979-10-15 1979-10-15 超高真空用二重シ−ル型バルブ Expired JPS5917302B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP54132666A JPS5917302B2 (ja) 1979-10-15 1979-10-15 超高真空用二重シ−ル型バルブ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP54132666A JPS5917302B2 (ja) 1979-10-15 1979-10-15 超高真空用二重シ−ル型バルブ

Publications (2)

Publication Number Publication Date
JPS5659064A true JPS5659064A (en) 1981-05-22
JPS5917302B2 JPS5917302B2 (ja) 1984-04-20

Family

ID=15086647

Family Applications (1)

Application Number Title Priority Date Filing Date
JP54132666A Expired JPS5917302B2 (ja) 1979-10-15 1979-10-15 超高真空用二重シ−ル型バルブ

Country Status (1)

Country Link
JP (1) JPS5917302B2 (ja)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5133561A (en) * 1990-02-26 1992-07-28 Tokyo Electron Limited Sealing device
JPH07280119A (ja) * 1994-04-07 1995-10-27 Kyoshin Eng:Kk 減圧及び加圧兼用容器に用いる弁装置
JP2003161375A (ja) * 2001-11-27 2003-06-06 Miura Co Ltd バルブ

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1991008412A1 (fr) * 1989-12-01 1991-06-13 Canon Kabushiki Kaisha Vanne a vide et dispositif de traitement au vide utilisant une telle vanne
JP4014353B2 (ja) * 2000-06-08 2007-11-28 三浦工業株式会社 逆止弁

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5110849U (ja) * 1974-07-10 1976-01-27

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5110849U (ja) * 1974-07-10 1976-01-27

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5133561A (en) * 1990-02-26 1992-07-28 Tokyo Electron Limited Sealing device
JPH07280119A (ja) * 1994-04-07 1995-10-27 Kyoshin Eng:Kk 減圧及び加圧兼用容器に用いる弁装置
JP2003161375A (ja) * 2001-11-27 2003-06-06 Miura Co Ltd バルブ

Also Published As

Publication number Publication date
JPS5917302B2 (ja) 1984-04-20

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