JPS5658856U - - Google Patents
Info
- Publication number
- JPS5658856U JPS5658856U JP1979139676U JP13967679U JPS5658856U JP S5658856 U JPS5658856 U JP S5658856U JP 1979139676 U JP1979139676 U JP 1979139676U JP 13967679 U JP13967679 U JP 13967679U JP S5658856 U JPS5658856 U JP S5658856U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1979139676U JPS6131331Y2 (en:Method) | 1979-10-09 | 1979-10-09 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1979139676U JPS6131331Y2 (en:Method) | 1979-10-09 | 1979-10-09 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5658856U true JPS5658856U (en:Method) | 1981-05-20 |
| JPS6131331Y2 JPS6131331Y2 (en:Method) | 1986-09-11 |
Family
ID=29371016
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1979139676U Expired JPS6131331Y2 (en:Method) | 1979-10-09 | 1979-10-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6131331Y2 (en:Method) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0262A (ja) * | 1989-04-07 | 1990-01-05 | Daicel Chem Ind Ltd | フォトマスクカバー |
| JP2011209344A (ja) * | 2010-03-29 | 2011-10-20 | Shin-Etsu Chemical Co Ltd | ペリクル及びその取り付け方法、並びにペリクル付マスク及びマスク |
-
1979
- 1979-10-09 JP JP1979139676U patent/JPS6131331Y2/ja not_active Expired
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0262A (ja) * | 1989-04-07 | 1990-01-05 | Daicel Chem Ind Ltd | フォトマスクカバー |
| JP2011209344A (ja) * | 2010-03-29 | 2011-10-20 | Shin-Etsu Chemical Co Ltd | ペリクル及びその取り付け方法、並びにペリクル付マスク及びマスク |
| TWI513590B (zh) * | 2010-03-29 | 2015-12-21 | 信越化學工業股份有限公司 | 防塵薄膜組件及其安裝方法、設有防塵薄膜組件之光罩與光罩 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6131331Y2 (en:Method) | 1986-09-11 |