JPS5658856U - - Google Patents

Info

Publication number
JPS5658856U
JPS5658856U JP1979139676U JP13967679U JPS5658856U JP S5658856 U JPS5658856 U JP S5658856U JP 1979139676 U JP1979139676 U JP 1979139676U JP 13967679 U JP13967679 U JP 13967679U JP S5658856 U JPS5658856 U JP S5658856U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1979139676U
Other languages
Japanese (ja)
Other versions
JPS6131331Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1979139676U priority Critical patent/JPS6131331Y2/ja
Publication of JPS5658856U publication Critical patent/JPS5658856U/ja
Application granted granted Critical
Publication of JPS6131331Y2 publication Critical patent/JPS6131331Y2/ja
Expired legal-status Critical Current

Links

JP1979139676U 1979-10-09 1979-10-09 Expired JPS6131331Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1979139676U JPS6131331Y2 (enrdf_load_stackoverflow) 1979-10-09 1979-10-09

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1979139676U JPS6131331Y2 (enrdf_load_stackoverflow) 1979-10-09 1979-10-09

Publications (2)

Publication Number Publication Date
JPS5658856U true JPS5658856U (enrdf_load_stackoverflow) 1981-05-20
JPS6131331Y2 JPS6131331Y2 (enrdf_load_stackoverflow) 1986-09-11

Family

ID=29371016

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1979139676U Expired JPS6131331Y2 (enrdf_load_stackoverflow) 1979-10-09 1979-10-09

Country Status (1)

Country Link
JP (1) JPS6131331Y2 (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0262A (ja) * 1989-04-07 1990-01-05 Daicel Chem Ind Ltd フォトマスクカバー
JP2011209344A (ja) * 2010-03-29 2011-10-20 Shin-Etsu Chemical Co Ltd ペリクル及びその取り付け方法、並びにペリクル付マスク及びマスク

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0262A (ja) * 1989-04-07 1990-01-05 Daicel Chem Ind Ltd フォトマスクカバー
JP2011209344A (ja) * 2010-03-29 2011-10-20 Shin-Etsu Chemical Co Ltd ペリクル及びその取り付け方法、並びにペリクル付マスク及びマスク
TWI513590B (zh) * 2010-03-29 2015-12-21 Shinetsu Chemical Co 防塵薄膜組件及其安裝方法、設有防塵薄膜組件之光罩與光罩

Also Published As

Publication number Publication date
JPS6131331Y2 (enrdf_load_stackoverflow) 1986-09-11

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