JPS5654796U - - Google Patents
Info
- Publication number
- JPS5654796U JPS5654796U JP13778879U JP13778879U JPS5654796U JP S5654796 U JPS5654796 U JP S5654796U JP 13778879 U JP13778879 U JP 13778879U JP 13778879 U JP13778879 U JP 13778879U JP S5654796 U JPS5654796 U JP S5654796U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13778879U JPS5919273Y2 (ja) | 1979-10-03 | 1979-10-03 | 乾燥装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13778879U JPS5919273Y2 (ja) | 1979-10-03 | 1979-10-03 | 乾燥装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5654796U true JPS5654796U (ja) | 1981-05-13 |
| JPS5919273Y2 JPS5919273Y2 (ja) | 1984-06-04 |
Family
ID=29369200
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13778879U Expired JPS5919273Y2 (ja) | 1979-10-03 | 1979-10-03 | 乾燥装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5919273Y2 (ja) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007192528A (ja) * | 2006-01-23 | 2007-08-02 | Orient Sogyo:Kk | 印刷機の乾燥装置 |
| JP2011106772A (ja) * | 2009-11-19 | 2011-06-02 | Hirano Tecseed Co Ltd | 熱処理装置 |
| JP2012037163A (ja) * | 2010-08-09 | 2012-02-23 | Clean Technology Kk | 薄膜塗工装置に設ける乾燥装置 |
| JP2016145702A (ja) * | 2015-01-28 | 2016-08-12 | 芝浦メカトロニクス株式会社 | 基板処理装置 |
-
1979
- 1979-10-03 JP JP13778879U patent/JPS5919273Y2/ja not_active Expired
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007192528A (ja) * | 2006-01-23 | 2007-08-02 | Orient Sogyo:Kk | 印刷機の乾燥装置 |
| JP2011106772A (ja) * | 2009-11-19 | 2011-06-02 | Hirano Tecseed Co Ltd | 熱処理装置 |
| JP2012037163A (ja) * | 2010-08-09 | 2012-02-23 | Clean Technology Kk | 薄膜塗工装置に設ける乾燥装置 |
| CN102371239A (zh) * | 2010-08-09 | 2012-03-14 | 惠清科技股份有限公司 | 设于薄膜涂布装置的干燥装置 |
| CN102371239B (zh) * | 2010-08-09 | 2015-01-07 | 惠清科技股份有限公司 | 设于薄膜涂布装置的干燥装置 |
| JP2016145702A (ja) * | 2015-01-28 | 2016-08-12 | 芝浦メカトロニクス株式会社 | 基板処理装置 |
| JP2017211178A (ja) * | 2015-01-28 | 2017-11-30 | 芝浦メカトロニクス株式会社 | 基板処理装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5919273Y2 (ja) | 1984-06-04 |