JPS5651699A - Electron beam irradiation device - Google Patents

Electron beam irradiation device

Info

Publication number
JPS5651699A
JPS5651699A JP12767579A JP12767579A JPS5651699A JP S5651699 A JPS5651699 A JP S5651699A JP 12767579 A JP12767579 A JP 12767579A JP 12767579 A JP12767579 A JP 12767579A JP S5651699 A JPS5651699 A JP S5651699A
Authority
JP
Japan
Prior art keywords
electron beam
beam irradiation
irradiation device
electron
irradiation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12767579A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6327680B2 (cs
Inventor
Hidetoshi Kinuta
Masakatsu Inagaki
Shigeru Sasaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Electric Industries Ltd
Original Assignee
Sumitomo Electric Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Electric Industries Ltd filed Critical Sumitomo Electric Industries Ltd
Priority to JP12767579A priority Critical patent/JPS5651699A/ja
Publication of JPS5651699A publication Critical patent/JPS5651699A/ja
Publication of JPS6327680B2 publication Critical patent/JPS6327680B2/ja
Granted legal-status Critical Current

Links

JP12767579A 1979-10-02 1979-10-02 Electron beam irradiation device Granted JPS5651699A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12767579A JPS5651699A (en) 1979-10-02 1979-10-02 Electron beam irradiation device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12767579A JPS5651699A (en) 1979-10-02 1979-10-02 Electron beam irradiation device

Publications (2)

Publication Number Publication Date
JPS5651699A true JPS5651699A (en) 1981-05-09
JPS6327680B2 JPS6327680B2 (cs) 1988-06-03

Family

ID=14965929

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12767579A Granted JPS5651699A (en) 1979-10-02 1979-10-02 Electron beam irradiation device

Country Status (1)

Country Link
JP (1) JPS5651699A (cs)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5083695A (cs) * 1973-11-28 1975-07-07
JPS5290798A (en) * 1976-01-26 1977-07-30 Mitsubishi Electric Corp Exit window for charged particles

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5083695A (cs) * 1973-11-28 1975-07-07
JPS5290798A (en) * 1976-01-26 1977-07-30 Mitsubishi Electric Corp Exit window for charged particles

Also Published As

Publication number Publication date
JPS6327680B2 (cs) 1988-06-03

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