JPS565131A - Material treating apparatus - Google Patents

Material treating apparatus

Info

Publication number
JPS565131A
JPS565131A JP8034479A JP8034479A JPS565131A JP S565131 A JPS565131 A JP S565131A JP 8034479 A JP8034479 A JP 8034479A JP 8034479 A JP8034479 A JP 8034479A JP S565131 A JPS565131 A JP S565131A
Authority
JP
Japan
Prior art keywords
hole
flange
closing member
pipe
holding member
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8034479A
Other languages
Japanese (ja)
Inventor
Haruki Kurihara
Yoichi Unno
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP8034479A priority Critical patent/JPS565131A/en
Publication of JPS565131A publication Critical patent/JPS565131A/en
Pending legal-status Critical Current

Links

Landscapes

  • Physical Or Chemical Processes And Apparatus (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)

Abstract

PURPOSE: To provide an apparatus such as for the growth of crystals in a liquid phase wherein, in case of attaching and detaching a material holding member such as a rotary port or the like, material treatment is carried out in an extremely good condition without adhering dusts to said holding member and air-tightness in the apparatus can be sufficiently maintained.
CONSTITUTION: A freely attachable and detachable closing member 24 is jointed to a flange 22 of a pipe 21 of a material treating apparatus such as a liquid-phase crystal growing apparatus or the like. A hole 26 communicated to a gap G from the above described flange 22, a hole 28 to an outer periphery of the flange from the jointed surface of the flange 22 and the closing member 24, and a hole 30 piercing through the closing member 24 in a U-shaped manner are provided and the hole 26 is communicated with an air supply pipe 27 and the hole 28 with an discharge hole 29 respectively. In case of attaching or detaching a material holding member such as a rotary port 11 or the like to said apparatus, the closing member 24 is separated from the flange 22 and an inner pipe 25 as well as a rotary port 11 are drawn out from an outer pipe to be taken out into a dustless gas without adhering dusts thereto. Moreover, because the closure member 24 is not arranged with pipes, it is not necessary to pay particular attention about hydrogen gas.
COPYRIGHT: (C)1981,JPO&Japio
JP8034479A 1979-06-26 1979-06-26 Material treating apparatus Pending JPS565131A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8034479A JPS565131A (en) 1979-06-26 1979-06-26 Material treating apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8034479A JPS565131A (en) 1979-06-26 1979-06-26 Material treating apparatus

Publications (1)

Publication Number Publication Date
JPS565131A true JPS565131A (en) 1981-01-20

Family

ID=13715632

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8034479A Pending JPS565131A (en) 1979-06-26 1979-06-26 Material treating apparatus

Country Status (1)

Country Link
JP (1) JPS565131A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012040563A (en) * 2000-05-23 2012-03-01 Rohm & Haas Co Apparatus with improved safety feature for high temperature industrial process

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012040563A (en) * 2000-05-23 2012-03-01 Rohm & Haas Co Apparatus with improved safety feature for high temperature industrial process
JP2013126662A (en) * 2000-05-23 2013-06-27 Rohm & Haas Co Apparatus with improved safety feature for high temperature industrial process

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