JPS564386B2 - - Google Patents

Info

Publication number
JPS564386B2
JPS564386B2 JP10203076A JP10203076A JPS564386B2 JP S564386 B2 JPS564386 B2 JP S564386B2 JP 10203076 A JP10203076 A JP 10203076A JP 10203076 A JP10203076 A JP 10203076A JP S564386 B2 JPS564386 B2 JP S564386B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP10203076A
Other languages
Japanese (ja)
Other versions
JPS5327367A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10203076A priority Critical patent/JPS5327367A/ja
Publication of JPS5327367A publication Critical patent/JPS5327367A/ja
Publication of JPS564386B2 publication Critical patent/JPS564386B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Polishing Bodies And Polishing Tools (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
JP10203076A 1976-08-26 1976-08-26 Polisher Granted JPS5327367A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10203076A JPS5327367A (en) 1976-08-26 1976-08-26 Polisher

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10203076A JPS5327367A (en) 1976-08-26 1976-08-26 Polisher

Publications (2)

Publication Number Publication Date
JPS5327367A JPS5327367A (en) 1978-03-14
JPS564386B2 true JPS564386B2 (sv) 1981-01-29

Family

ID=14316348

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10203076A Granted JPS5327367A (en) 1976-08-26 1976-08-26 Polisher

Country Status (1)

Country Link
JP (1) JPS5327367A (sv)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58208416A (ja) * 1982-05-28 1983-12-05 Asahi Chem Ind Co Ltd 高配向ポリエステルフイラメントの製造方法
JPS58208415A (ja) * 1982-05-28 1983-12-05 Asahi Chem Ind Co Ltd 易染性ポリエチレンテレフタレ−ト繊維
JPS6269819A (ja) * 1985-09-19 1987-03-31 Teijin Ltd ポリエステル繊維
JP4798713B2 (ja) * 2007-03-26 2011-10-19 ローム アンド ハース エレクトロニック マテリアルズ シーエムピー ホウルディングス インコーポレイテッド 研磨パッドの製造方法

Also Published As

Publication number Publication date
JPS5327367A (en) 1978-03-14

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