JPS564239A - Manufacture of semiconductor device - Google Patents

Manufacture of semiconductor device

Info

Publication number
JPS564239A
JPS564239A JP7974179A JP7974179A JPS564239A JP S564239 A JPS564239 A JP S564239A JP 7974179 A JP7974179 A JP 7974179A JP 7974179 A JP7974179 A JP 7974179A JP S564239 A JPS564239 A JP S564239A
Authority
JP
Japan
Prior art keywords
ink
isobutyl methacrylate
glass
crystalline glass
splashing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7974179A
Other languages
Japanese (ja)
Other versions
JPS5846058B2 (en
Inventor
Masaaki Takahashi
Yutaka Misawa
Komei Yatsuno
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP54079741A priority Critical patent/JPS5846058B2/en
Publication of JPS564239A publication Critical patent/JPS564239A/en
Publication of JPS5846058B2 publication Critical patent/JPS5846058B2/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02107—Forming insulating materials on a substrate

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Bipolar Transistors (AREA)
  • Formation Of Insulating Films (AREA)

Abstract

PURPOSE:To perform sealing-up with a crystalline glass whose main constituents are ZnO, B2O5 and SiO2, by changing a medium comprising diethylene glycol dibutyl ether and isobutyl methacrylate ester into ash or splashing the medium at a temperature not higher than the softening point of the crystalline glass. CONSTITUTION:2-50wt% of isobutyl methacrylate is dissolved in diethylene glycol dibutyl ether. The solution is kneaded with a crystalline glass whose main constituents are ZnO, B2O3 and SiO2 to prepare printing ink. The molecular weight of the isobutyl methacrylate is set at 10<6> or less so that changing to ash and splashing are facilitated, the quantity of residual carbon is reduced and the electric properties of a semiconductor device are not deteriorated. The viscosity of the ink is adjusted to about 1.5-5X10<4> cp. The ink is printed on a P-N junction. The printed ink is maintained at the softening point of the glass for about 5-30min. As a result, no bubbles and pinholes are produced, glass projections are greatly decreased, following work is facilitated, pattern accuracy is enhanced and production yield is improved.
JP54079741A 1979-06-26 1979-06-26 Manufacturing method of semiconductor device Expired JPS5846058B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP54079741A JPS5846058B2 (en) 1979-06-26 1979-06-26 Manufacturing method of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP54079741A JPS5846058B2 (en) 1979-06-26 1979-06-26 Manufacturing method of semiconductor device

Publications (2)

Publication Number Publication Date
JPS564239A true JPS564239A (en) 1981-01-17
JPS5846058B2 JPS5846058B2 (en) 1983-10-14

Family

ID=13698636

Family Applications (1)

Application Number Title Priority Date Filing Date
JP54079741A Expired JPS5846058B2 (en) 1979-06-26 1979-06-26 Manufacturing method of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5846058B2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6135800A (en) * 1984-07-26 1986-02-20 株式会社林原生物化学研究所 Production of crystalline alpha-maltose
US8147615B2 (en) * 2004-11-05 2012-04-03 Infineon Technologies Ag Method of fabricating semiconductor cleaners

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6135800A (en) * 1984-07-26 1986-02-20 株式会社林原生物化学研究所 Production of crystalline alpha-maltose
JPH0543360B2 (en) * 1984-07-26 1993-07-01 Hayashibara Biochem Lab
US8147615B2 (en) * 2004-11-05 2012-04-03 Infineon Technologies Ag Method of fabricating semiconductor cleaners
US8409363B2 (en) 2004-11-05 2013-04-02 Infineon Technologies Ag Method of fabricating semiconductor cleaners
US8647441B2 (en) 2004-11-05 2014-02-11 Infineon Technologies Ag Method of fabricating semiconductor cleaners
US9529366B2 (en) 2004-11-05 2016-12-27 Infineon Technologies Ag Method of fabricating semiconductor cleaners

Also Published As

Publication number Publication date
JPS5846058B2 (en) 1983-10-14

Similar Documents

Publication Publication Date Title
JPS5289341A (en) Indication device
JPS564239A (en) Manufacture of semiconductor device
JPS5411727A (en) Telephoto lens
JPS5436694A (en) Electric processing liquid and method of producing same
ES8101018A1 (en) Iodine extraction process.
ES472708A1 (en) Bromhexine derivatives and process for making same
JPS53105246A (en) Production of fiber for optical transmission
JPS52115848A (en) One-pack type, curable high polymer composition
JPS54117556A (en) Production of molded article of silicone rubber
JPS5231754A (en) Objective lens with high percentage of contraction
JPS5398399A (en) Process for preparing epoxy resin
JPS52109874A (en) Photo mask correcting unit
JPS57172337A (en) Photosensitive resin composition
JPS5242595A (en) Process for preparing a novolak resin suitable for fiber-forming
JPS51119400A (en) Sodium silicate production
JPS5365357A (en) Photocurable organo polysiloxane composition
JPS5411674A (en) Semiconductor device of mesa type
JPS5278450A (en) Continuous process for producing optical glass fibers
JPS5392889A (en) Curable composition
JPS536389A (en) Manufacture of resin composites
JPS51112861A (en) A process for producing molded articles based on polycarbonate having reinforced welds
JPS5258780A (en) Resinous boards
JPS5360240A (en) Glass fiber for optical communicaion
JPS5288350A (en) Production of fibers for optical transmission
JPS52154849A (en) Curable liquid polymer composition