JPS52109874A - Photo mask correcting unit - Google Patents

Photo mask correcting unit

Info

Publication number
JPS52109874A
JPS52109874A JP2618976A JP2618976A JPS52109874A JP S52109874 A JPS52109874 A JP S52109874A JP 2618976 A JP2618976 A JP 2618976A JP 2618976 A JP2618976 A JP 2618976A JP S52109874 A JPS52109874 A JP S52109874A
Authority
JP
Japan
Prior art keywords
correcting unit
photo mask
mask correcting
laser light
prisms
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2618976A
Other languages
Japanese (ja)
Other versions
JPS5334460B2 (en
Inventor
Mikio Hongo
Junichi Nakabayashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP2618976A priority Critical patent/JPS52109874A/en
Publication of JPS52109874A publication Critical patent/JPS52109874A/en
Publication of JPS5334460B2 publication Critical patent/JPS5334460B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Preparing Plates And Mask In Photomechanical Process (AREA)

Abstract

PURPOSE: To correct the defects on metallic film larger than the spot diameter of laser light with high speed and good accuracy, by feeding the feed of laser light with the scanning unit consisting of two prisms.
COPYRIGHT: (C)1977,JPO&Japio
JP2618976A 1976-03-12 1976-03-12 Photo mask correcting unit Granted JPS52109874A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2618976A JPS52109874A (en) 1976-03-12 1976-03-12 Photo mask correcting unit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2618976A JPS52109874A (en) 1976-03-12 1976-03-12 Photo mask correcting unit

Publications (2)

Publication Number Publication Date
JPS52109874A true JPS52109874A (en) 1977-09-14
JPS5334460B2 JPS5334460B2 (en) 1978-09-20

Family

ID=12186543

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2618976A Granted JPS52109874A (en) 1976-03-12 1976-03-12 Photo mask correcting unit

Country Status (1)

Country Link
JP (1) JPS52109874A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5527686A (en) * 1978-08-21 1980-02-27 Sony Corp Projection eliminating device
JPS56162748A (en) * 1980-05-21 1981-12-14 Hitachi Ltd Defect correcting method for photomask
JPS5871617A (en) * 1981-10-23 1983-04-28 Nec Corp Laser annealing apparatus
JP2007538243A (en) * 2004-05-20 2007-12-27 テラビュー リミテッド Apparatus and method for investigating a sample

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5527686A (en) * 1978-08-21 1980-02-27 Sony Corp Projection eliminating device
JPS56162748A (en) * 1980-05-21 1981-12-14 Hitachi Ltd Defect correcting method for photomask
JPS5871617A (en) * 1981-10-23 1983-04-28 Nec Corp Laser annealing apparatus
JP2007538243A (en) * 2004-05-20 2007-12-27 テラビュー リミテッド Apparatus and method for investigating a sample
US8373126B2 (en) 2004-05-20 2013-02-12 Teraview Limited Apparatus and method for investigating a sample

Also Published As

Publication number Publication date
JPS5334460B2 (en) 1978-09-20

Similar Documents

Publication Publication Date Title
JPS5237445A (en) Lens system rendering variable characteristics of an image plane
JPS52147430A (en) Focus detection device
JPS5328431A (en) Copier
JPS52109874A (en) Photo mask correcting unit
JPS51149004A (en) Optical apparatus
JPS52138924A (en) Focal detector
JPS52132851A (en) Optical detector of scanning type
JPS5289360A (en) Jam detector
JPS51146850A (en) Optical detector
JPS525520A (en) Ophthalmo funduscopic camera
JPS527723A (en) Photographic lens of large aperture ratio
JPS5327439A (en) Focus measuring device
JPS5319807A (en) Luminous flux focus controller
JPS52152218A (en) Picture printer
JPS5326122A (en) Zoom lens
JPS52127327A (en) Foucsing lens system
JPS51134642A (en) Photo head
JPS52150044A (en) Copier
JPS52117578A (en) Electron beam exposing method
JPS52110031A (en) Detector for focusing
JPS5349957A (en) Focusing method for electronic beam exposure device
JPS52116177A (en) Laser beam exposure unit
JPS51117062A (en) Differential measuring device
JPS52127328A (en) Focusing lens system
JPS5292436A (en) Optical letter scanning unit