JPS5640492B2 - - Google Patents
Info
- Publication number
- JPS5640492B2 JPS5640492B2 JP12388575A JP12388575A JPS5640492B2 JP S5640492 B2 JPS5640492 B2 JP S5640492B2 JP 12388575 A JP12388575 A JP 12388575A JP 12388575 A JP12388575 A JP 12388575A JP S5640492 B2 JPS5640492 B2 JP S5640492B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
- C04B41/80—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone of only ceramics
- C04B41/91—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone of only ceramics involving the removal of part of the materials of the treated articles, e.g. etching
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P50/00—Etching of wafers, substrates or parts of devices
- H10P50/60—Wet etching
- H10P50/64—Wet etching of semiconductor materials
- H10P50/642—Chemical etching
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
- C09K13/00—Etching, surface-brightening or pickling compositions
- C09K13/04—Etching, surface-brightening or pickling compositions containing an inorganic acid
- C09K13/08—Etching, surface-brightening or pickling compositions containing an inorganic acid containing a fluorine compound
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P14/00—Formation of materials, e.g. in the shape of layers or pillars
- H10P14/60—Formation of materials, e.g. in the shape of layers or pillars of insulating materials
- H10P14/63—Formation of materials, e.g. in the shape of layers or pillars of insulating materials characterised by the formation processes
- H10P14/6302—Non-deposition formation processes
- H10P14/6304—Formation by oxidation, e.g. oxidation of the substrate
- H10P14/6314—Formation by oxidation, e.g. oxidation of the substrate of a metallic layer
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W20/00—Interconnections in chips, wafers or substrates
- H10W20/01—Manufacture or treatment
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Ceramic Engineering (AREA)
- Inorganic Chemistry (AREA)
- Structural Engineering (AREA)
- Weting (AREA)
- ing And Chemical Polishing (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR7435152A FR2288138A1 (fr) | 1974-10-18 | 1974-10-18 | Procede d'attaque de l'alumine |
| FR7435151A FR2288392A1 (fr) | 1974-10-18 | 1974-10-18 | Procede de realisation de dispositifs semiconducteurs |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5169369A JPS5169369A (cg-RX-API-DMAC10.html) | 1976-06-15 |
| JPS5640492B2 true JPS5640492B2 (cg-RX-API-DMAC10.html) | 1981-09-21 |
Family
ID=26218562
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12388575A Expired JPS5640492B2 (cg-RX-API-DMAC10.html) | 1974-10-18 | 1975-10-16 |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JPS5640492B2 (cg-RX-API-DMAC10.html) |
| BR (1) | BR7506737A (cg-RX-API-DMAC10.html) |
| DE (1) | DE2546316C2 (cg-RX-API-DMAC10.html) |
| GB (1) | GB1526425A (cg-RX-API-DMAC10.html) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3048083C2 (de) * | 1980-12-19 | 1983-09-29 | Ludwig 8900 Augsburg Fahrmbacher-Lutz | Verfahren zur chemischen Entfernung von Oxidschichten von Gegenständen aus Titan oder Titanlegierungen |
| JPS59184532A (ja) * | 1983-04-05 | 1984-10-19 | Oki Electric Ind Co Ltd | 半導体装置の製造方法 |
| AU2607599A (en) * | 1998-03-10 | 1999-09-27 | Scacco Electronics Consulting | Selective etching of silicon nitride by means of a wet chemical process |
| KR102562023B1 (ko) | 2018-01-30 | 2023-08-01 | 도쿄엘렉트론가부시키가이샤 | 기판 처리 방법, 기판 처리 장치 및 에칭액 |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2828193A (en) * | 1954-08-09 | 1958-03-25 | Turco Products Inc | Method for rejuvenation of aluminum treating solutions |
| JPS5141161B2 (cg-RX-API-DMAC10.html) * | 1972-08-25 | 1976-11-08 |
-
1975
- 1975-10-15 GB GB42222/75A patent/GB1526425A/en not_active Expired
- 1975-10-15 BR BR7506737*A patent/BR7506737A/pt unknown
- 1975-10-16 DE DE2546316A patent/DE2546316C2/de not_active Expired
- 1975-10-16 JP JP12388575A patent/JPS5640492B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| GB1526425A (en) | 1978-09-27 |
| DE2546316C2 (de) | 1982-11-11 |
| BR7506737A (pt) | 1976-08-17 |
| DE2546316A1 (de) | 1976-04-22 |
| JPS5169369A (cg-RX-API-DMAC10.html) | 1976-06-15 |